二手 TEL / TOKYO ELECTRON Alpha 8S #155754 待售
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已售出
ID: 155754
Furnace, 8"
Process: Poly
Safety specification: TEL Standard
System paint color: Biege white
System power rating:
AC200V, 3P / AC100V, 1P
Loading configuration:
(4) Loaders / (127) Wafer slots
Process pressure (Torr): Low pressure
Process temperature: 600º C
FTP Heater: Installed
Rapid cooling unit: Installed
Heater type: VOS-40-017
Process gases:
Process gas MFC 1,2,3,4: N2
Process gas MFC 5, 6: SiH4
Process gas MFC 7, 8, 9: PH3
Gas system:
Filter: MOTT Pou-20S-SV2, Ni
Air valve: FUJIKIN: Diaphragm type
Mega-mini and block
MFC: STEC SEC-74 Series
Check valve: FUJIKIN O-Ring seal type
Hand valve: FUJIKIN: Diaphragm type
Regulator: VERIFLO SQ Series
Pressure transducer: NAGANO ZT 17
Others:
Joint: Gasket type: Pure nickel type
Piping material: SUS316L Up tube
Piping working method: Welding
Welding methods: Automatic welding
Gas exhaust system:
Dry pump: EBARA A150W-T
Main valve: MKS 172-1080P
Vacuum gauge: MKS Baratron sensor normal type
Joint:
Gasket
JIS Method
Piping material: SUS316BA, stainless steel
APC: MKS 253B-3-80-2, butterfly valve
VG1: 0 to 10 Torr, Normal type
VG2: 0 to 1000 Torr, Normal type
VG3: ULVAC GP-2A, Pirani gauge
Manifold:
Structure:
Sealing method: End point sealing
Material: SUS316L Stainless steel
Port:
Gas port: 3/8" Ultra torr
Inner T/C port: 20DAI Ultra torr
Exhaust port: 3 DIA
Cooling method: Water cooling
Safety Interlock:
Gas flow low MFC:
Too low gas flow
Alarm: > 5%
Abort: ± 10%
Gas flow high MFC:
Too high gas flow
Alarm: > 5%
Abort: ± 10%
Low PCW flow:
No PCW supply
Alarm: > 3min
Abort: > 5min
Heater break down: > 7min
PCW Leak detection: Alarm
Process heater over temperature:
Chamber over heat
Heater break down: > 3 sec
Furnace area over temperature: Alarm
Heater break down: > 3 sec
SCR Area over temperature: Alarm
Heater break down: > 3 sec
Interruption of electric power: Alarm
Abort: < 3 sec
Heater break down: > 3 sec
Gas flow sequence: Alarm
Pump off: Alarm
Pump trouble: Alarm
Pressure low (reactor tube pressure): Alarm
Pressure high (reactor tube pressure): Alarm
Leak check (reactor tube pressure):
Main valve off delay: 10 min
Abort: > 20mTorr
Currently warehoused
1997 vintage.
TEL/TOKYO ELECTRON ALPHA 8S是一種擴散爐,旨在通過對半導體晶片的創新加熱、提取和熱處理,幫助優化和提煉半導體工藝。先進的熱控設備允許對整個過程進行高精度的溫度控制,產生一致的結果。TEL ALPHA-8S提供低溫掃描和「節能」功能,安全可靠地創建最佳的焊接工藝和屏障膜塗層工藝。TOKYO ELECTRON ALPHA 8 S配備了可配置以保證無發射處理的高性能排氣提取系統。它具有兩個最高溫度為1920 °C的電熱加熱器,為用戶提供了一種高效、安全的退火和熱處理樣品的方法,並以可重復的方式提供一致的結果。TOKYO ELECTRON ALPHA-8 S進一步配備了連續的AUTO PECVD,並配有充氣混合器,能夠快速方便的單元維護。TOKYO ELECTRON ALPHA 8S是一種全自動機器,既直觀又用戶友好。其健壯的設計包括增強的可編程性、強大的硬件控制以及用戶定義的報警和程序序列設置等功能。該工具還具有可擴展性,允許用戶隨著時間的推移添加組件和升級功能。TEL Alpha 8S進一步配備了多個附件,確保安全無憂的體驗。這些附件包括一個先進的過濾器資產,可以防止任何可能的汙染。真空密封功能可實現高效、可重復的過程,而高性能散熱器模型可確保整個樣品的均勻性。最後,可選的PC Control模式允許用戶輕松訪問和管理數據和程序設置。ALPHA 8 S是一種高效高效的擴散爐,配有先進的特性和配件,以確保最高效的半導體工藝。其創新的設計和特點使該解決方案成為一系列復雜且高度精確的熱處理、退火和塗層工藝的理想選擇。
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