二手 TEL / TOKYO ELECTRON Alpha 8S #155754 待售

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ID: 155754
Furnace, 8" Process: Poly Safety specification: TEL Standard System paint color: Biege white System power rating: AC200V, 3P / AC100V, 1P Loading configuration: (4) Loaders / (127) Wafer slots Process pressure (Torr): Low pressure Process temperature: 600º C FTP Heater: Installed Rapid cooling unit: Installed Heater type: VOS-40-017 Process gases: Process gas MFC 1,2,3,4: N2 Process gas MFC 5, 6: SiH4 Process gas MFC 7, 8, 9: PH3 Gas system: Filter: MOTT Pou-20S-SV2, Ni Air valve: FUJIKIN: Diaphragm type Mega-mini and block MFC: STEC SEC-74 Series Check valve: FUJIKIN O-Ring seal type Hand valve: FUJIKIN: Diaphragm type Regulator: VERIFLO SQ Series Pressure transducer: NAGANO ZT 17 Others: Joint: Gasket type: Pure nickel type Piping material: SUS316L Up tube Piping working method: Welding Welding methods: Automatic welding Gas exhaust system: Dry pump: EBARA A150W-T Main valve: MKS 172-1080P Vacuum gauge: MKS Baratron sensor normal type Joint: Gasket JIS Method Piping material: SUS316BA, stainless steel APC: MKS 253B-3-80-2, butterfly valve VG1: 0 to 10 Torr, Normal type VG2: 0 to 1000 Torr, Normal type VG3: ULVAC GP-2A, Pirani gauge Manifold: Structure: Sealing method: End point sealing Material: SUS316L Stainless steel Port: Gas port: 3/8" Ultra torr Inner T/C port: 20DAI Ultra torr Exhaust port: 3 DIA Cooling method: Water cooling Safety Interlock: Gas flow low MFC: Too low gas flow Alarm: > 5% Abort: ± 10% Gas flow high MFC: Too high gas flow Alarm: > 5% Abort: ± 10% Low PCW flow: No PCW supply Alarm: > 3min Abort: > 5min Heater break down: > 7min PCW Leak detection: Alarm Process heater over temperature: Chamber over heat Heater break down: > 3 sec Furnace area over temperature: Alarm Heater break down: > 3 sec SCR Area over temperature: Alarm Heater break down: > 3 sec Interruption of electric power: Alarm Abort: < 3 sec Heater break down: > 3 sec Gas flow sequence: Alarm Pump off: Alarm Pump trouble: Alarm Pressure low (reactor tube pressure): Alarm Pressure high (reactor tube pressure): Alarm Leak check (reactor tube pressure): Main valve off delay: 10 min Abort: > 20mTorr Currently warehoused 1997 vintage.
TEL/TOKYO ELECTRON ALPHA 8S是一種擴散爐,旨在通過對半導體晶片的創新加熱、提取和熱處理,幫助優化和提煉半導體工藝。先進的熱控設備允許對整個過程進行高精度的溫度控制,產生一致的結果。TEL ALPHA-8S提供低溫掃描和「節能」功能,安全可靠地創建最佳的焊接工藝和屏障膜塗層工藝。TOKYO ELECTRON ALPHA 8 S配備了可配置以保證無發射處理的高性能排氣提取系統。它具有兩個最高溫度為1920 °C的電熱加熱器,為用戶提供了一種高效、安全的退火和熱處理樣品的方法,並以可重復的方式提供一致的結果。TOKYO ELECTRON ALPHA-8 S進一步配備了連續的AUTO PECVD,並配有充氣混合器,能夠快速方便的單元維護。TOKYO ELECTRON ALPHA 8S是一種全自動機器,既直觀又用戶友好。其健壯的設計包括增強的可編程性、強大的硬件控制以及用戶定義的報警和程序序列設置等功能。該工具還具有可擴展性,允許用戶隨著時間的推移添加組件和升級功能。TEL Alpha 8S進一步配備了多個附件,確保安全無憂的體驗。這些附件包括一個先進的過濾器資產,可以防止任何可能的汙染。真空密封功能可實現高效、可重復的過程,而高性能散熱器模型可確保整個樣品的均勻性。最後,可選的PC Control模式允許用戶輕松訪問和管理數據和程序設置。ALPHA 8 S是一種高效高效的擴散爐,配有先進的特性和配件,以確保最高效的半導體工藝。其創新的設計和特點使該解決方案成為一系列復雜且高度精確的熱處理、退火和塗層工藝的理想選擇。
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