二手 VARIAN / VEECO GENxplor #9211484 待售
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ID: 9211484
優質的: 2015
MBE Growth system
Vacuum barrier
VBC LN2 Piping system included
kSA 400 Analytical RHEED system, 6"
With k700-12 detector
RF Plasma source for nitrogen GENxplor
RF Source for nitrogen to change from phosphorus to nitrogen
RF Automatic matching unit:
Autotuner source
N2 - Nitrogen plasma source
Auto tuner power option: 110 - 110 VAC
(2) Projects:
GaP On sapphire (and Si), phosphorus-based red LED application
GaN On sapphire
MBE Growth chamber / Source flange assembly
Includes:
Growth chamber with flat seal flange
Full panel liquid nitrogen cooled cryoshroud
(10) 4.625" CF Effusion cell ports
4.625" x 4.5" Water-cooled source enclosures configured with sources
(10) Pneumatic effusion cell shutter ports
Shutter assemblies configured with sources
Top 21.5" CF Flange:
8" Manipulator port with Z-motion single platen horizontal manipulator stage
3" Single zone substrate heater with non-contact
Thermocouple and servo motor control for rotation
Capable of 1000°C TIC temperature
Capable of up to 60 RPM in either direction
DC Power supply
2.75" CF With pneumatically actuated main substrate shutter
(2) Liquid nitrogen feedthrus (Female bayonet)
(4) 2.75" Effusion cell viewing ports with shutters
Integral pumping chamber pumping package:
10" CF Pump port with cryo pump package
Includes:
1,500 CTI CT8 Cryo pump
VAT Pneumatic gate valve
Cryo compressor
Helium lines and cold head cables
8" CF Pump port with ion pump package
220 I/s Ion pump with control unit
(3) 2.75" CF Ports:
Ion gauge and control unit (GRANVILLE PHILLIPS P350)
SRS Residual gas analyzer (0-100 amu)
Titanium sublimation pump
8" CF Transfer port (Gate valve configured with buffer chamber)
4.5" CF Transfer viewport with manual shutter
RHEED Package:
Includes:
6" CF With RHEED screen with shutter
2 .75" CF With 15 keV RHEED gun, (staib) controller
With beam rocking, beam blanking, power supply
4.5" CF With linear retractable beam flux monitor
4.5" CF Optical port 1802 opposite BFM (blank)
(2) 4.5" CF Optical ports 1802 Opposed (blank)
Single-body system support frame
Integral cooling water manifold
Compressed air distribution manifold with pneumatic control circuits
(10) of these are for shutters
Base flange assembly
Includes:
(4) 2.75" CF Ports
2.75" Heated viewport with manualsShutter (pyrometer port)
BASF Pyrometer package (wavelength to be determined)
(3) 2.75" Ports (blank)
Effusion cell:
(3) 60cc Hot lip single filament effusion cell packages
For use with Indium and Gallium
Including:
60cc Hot lip effusion cell
60cc Conical PBN crucible
Linear-motion
Pneumatic shutter with material-specific shutter blade per source
Water cooled enclosure per source
DC Power supply
(2) 60cc Cold lip single filament effusion cell packages for aluminum
Including:
60cc Conical PBN crucible
Linear-motion
Pneumatic shutter with material-specific shutter blade per source
Water cooled enclosure per source
DC Power supply
Valved cracking effusion cell for use with P
Includes:
500cc Mark V P valved cracker
Linear-motion
Pneumatic shutter with material-specific shutter blade per source
Automated servo motor control package
White zone temperature controller
Water cooled enclosure
(2) DC Power supplies
Phosphorus recovery system package
Includes:
Phosphorus recovery system package
Includes:
830 l/s Mag lev turbo pump with backing pump and controllers
LN2 Cryotrap
Gate valve
Cold cathode gauge
5CC Dopant cell package for Si
Includes:
5cc Dopant effusion cell
5cc PBN Crucible
Linear-motion
Pneumatic shutter with material-specific shutter blade
Water cooled enclosure
DC Power supply
60cc Single filament effusion cell packages for use with Zn
Includes:
60cc Single Filament effusion cell
60cc Conical PBN crucible
Linear-motion
Pneumatic shutter with material-specific shutter blade per source
Water cooled enclosure
DC Power supply
Transfer with load-lock and buffer modules:
Entry / Exit load lock chamber
Includes:
8" Quick access door with integral viewport
Quartz lamps for heating to 200°C
8" CF Manual VAT gate valve for connection with the buffer chamber
250 l/s Turbo pump package with controller, roughing manifold, Backing scroll pump
Convection gauge
Ion gauge with control unit
Buffer / Preparation chamber assembly
Includes:
8" CF Viewports for transfer hand-off
Manually driven UHV elevator transfer system
(4) Storage shelves
o One (1) Magnetically-Coupled Transfer Rod Assembly for use from Buffer Chamber to
Growth Chamber
8" CF Pump port with 160 l/s ion pump and control unit
8" CF Manual gate valve (Connect with growth chamber)
Ion gauge and control unit (Granville Phillips GP350)
System electronics cabinets
Includes:
Two-bay electronics rack
System controller
Sixteen-loop PID temperature controller package
Power supply:
RF Source power supply
DC Power module
RF Plasma source RF generator
RF Power connector option: 120VAC
2015 vintage.
VARIAN/VEECO GENxplor是由半導體工業薄膜沈積系統領先供應商VEECO設計制造的分子束外延(MBE)設備。MBE系統提供高分辨率、經濟高效的薄膜沈積能力,使下一代半導體器件成為可能。VEECO GENxplor MBE將各種高級流程功能與直觀的圖形用戶界面相結合,可全面控制材料增長、層屬性和設備結果。它具有先進的多室設計,最多可同時使用四種不同的沈積材料,提供精確控制和可重現的層。它還為流程優化提供了一系列選項,以實現優化的設備產量和改進的流程可重復性。VARIAN GENxplor MBE單元具有12源2腔功能,可在不同沈積模式之間自動切換。Its.cghncluded advanced基板加熱,允許精確控制基板溫度以優化材料性能和工藝性能。它還具有廣泛的光學和電氣監測系統,可以實時監測材料沈積和層生長過程。GENxplor MBE機采用了創新的機械快門技術,在沈積過程中提供了控制腔室暴露時間和基體溫度的精度。這樣可以確保精確的可重復層厚度和均勻性。它還有一個高性能的真空抽水工具,提供快速和穩定的過程時間和最大的靜態真空一級性能。VARIAN/VEECO GENxplor MBE是一種先進且用途廣泛的薄膜沈積資產,旨在滿足設備產量和工藝可重復性要求。該模型具有高分辨率、高精度層沈積的優點,非常適合需要先進設備質量的研究和生產應用。它是一個高效可靠的薄膜沈積平臺,提供最大性能和無與倫比的工藝重復性。
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