二手 AMAT / APPLIED MATERIALS / HCT E500SD-B/5 #9193773 待售

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AMAT / APPLIED MATERIALS / HCT E500SD-B/5
已售出
ID: 9193773
優質的: 2011
Wire saw Water input: Input pressure: >2.5 bar Input temperature: <9°C Cooling unit power: 150 kW Incoming water flow (without cooling compressor): 18.5 m³/h Machine: Wire speed / Acceleration: 18*/5 m/s / m/s² Wire guides length: 520 mm Wire guides diameter: 300 mm Horizontal working space: 360 mm (4) Wire guides Wire guides drives power: 2x61 kW (2) Tables: Travel (depends on clamping): 290 mm Cutting speed: 0-9000 um/min Fast table speed: 0-500 mm/min Hydraulic passive clamping system Wire: (8) Pulleys Wire tension: 0-30N Wire length: 640 km Wire web width: 500mm Slurry: Tank capacity: 550 lit Pumping capacity: 2x160-200 * (1,6 kg/dm3) kg/min Pump power: 3x7.5 kW Pumping speed adjustment: 0-100% (3) Pumps (6) Manifolds in slicing room Frame & others: Stainless steel Sliding doors Color of frame and panels: RAL 5011 Utilities: Air pressure: 4 to 6 bar Air flow (dry): Min 25 m3/h Air exhaust (pipe ø150 mm): 3x100 m3/h Cooling unit power: 150 kW Incoming water pressure: Min 2.5 bar Incoming water temperature (with cooling compressor): 20 (30 RFNS) °C max 20 Incoming water temperature (without cooling compressor): 9 °C Max Incoming water flow (with cooling compressor): 10.3 m3/h Incoming water flow (without cooling compressor): 18.5 m3/h B5 Base with retrofit hardware Diamond wire technology Machine can run with 120 or 100 µm wire Electrical hooking 50 / 60 Hz: 3x400 / 480 Average power (with cooling compressor): 208 kVA Maximum power (with cooling compressor): 339 kVA Average power (without cooling compressor): 156 kVA Maximum power (without cooling compressor): 287 kVA Grid failure safety option 2011 vintage.
HCT E500SD-B/5晶體生長、鋸切和切片設備是一種精密工具,用於半導體工業的非氧化物晶體材料如GaAs、InP和相關復合半導體材料的生長、切片和研磨。該系統配有先進的環境室和線性偏心驅動器,用於精確、安全的操作。該單元設計為生長、鋸、截面和圈出各種材料,薄至0.5 μ m。該機采用600毫米X-Y PZT級,集成刀片控制工具,以及高性能的新一代視角攝像頭。該E500SD-B/5利用自動化增長控制(AGC)過程,該過程旨在提高即使是最具挑戰性的材料的切片和研磨的均勻性和安全性。鋸片采用先進的防護資產技術控制,Z向控制,使切割效果與晶體表面完美對齊,獲得表面損傷最小的完美切片。該模型可用於手動或通過模塊化控制器平臺執行單軸和多軸掃描,該平臺包含高度集成的微處理器,並允許更快的操作速度。Modular Controller平臺與Advanced Vacuum Controller集成,在生長和切片操作過程中監視和控制處理室,以實現卓越的性能。該設備還包括高質量的超低振動電動機,可消除振動並降低研磨過程的復雜性。該系統先進的光學單元包括超高分辨率數碼相機和顯微鏡,使樣品和整個過程的對準變得簡單準確。機器的控制軟件提供了可靠的數據報告和過程監控工具,同時執行多個過程參數,以最大限度地提高過程吞吐量。這與該工具的集成冷卻和加熱器資產相結合,使其適用於單晶和多晶生產。總體而言,AMAT E500SD-B/5是一種多功能的晶體生長、鋸切和切片模型,旨在確保高精度和高級性能。該設備針對非氧化物結晶材料的生長、切片和研磨進行了優化,為用戶提供了無與倫比的準確性和生產率。該系統先進的微處理器控制單元和種類繁多的組件使其成為半導體研究和工業應用的絕佳選擇。
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