loading

1019 結果發現: 用 Diffusion Furnaces & Accessories

  • POLYFLOW: C-492

    Control console for POLYFLOW quartz tube cleaner.
  • BRUCE BDF-4

    BRUCE: BDF-4

    LPCVD stack furnace, 4" (4) Tubes No pumps 7351 controllers De-installed.
  • KOKUSAI: DJ-853V-8BL

    Nitride Furnace.
  • KOKUSAI VERTRON III

    KOKUSAI: VERTRON III

    Vertical diffusion furnace / LPCVD / Poly CVD furnace, 8" Process applications: Dry-Ox, Wet-Ox, NO(N2O)-Anneal, Well Diffusion, N2(Ar, H2)-Anneal, PH3-Anneal, Doped/Undoped-Poly-Si, Doped/Undoped-SiGe-Poly, Si3N4, TEOS, HTO Accommodates: 5 wafers simultaneously Automatic filler dummy wafer supply by wafer detection mechanism SEMI standard compliant I/O stage Supports SMIF interface GUI tube controller (CX3000 series) SECS / GEM compatibility 1999 vintage.
  • TEL ALPHA 8S

    TEL: ALPHA 8S

    Furnace, 8" Process: Poly Safety specification: TEL Standard System paint color: Biege white System power rating: AC200V, 3P / AC100V, 1P Loading configuration: (4) Loaders / (127) Wafer slots Process pressure (Torr): Low pressure Process temperature: 600º C FTP Heater: Installed Rapid cooling unit: Installed Heater type: VOS-40-017 Process gases: Process gas MFC 1,2,3,4: N2 Process gas MFC 5, 6: SiH4 Process gas MFC 7, 8, 9: PH3 Gas system: Filter: MOTT Pou-20S-SV2, Ni Air valve: FUJIKIN: Diaphragm type Mega-mini and block MFC: STEC SEC-74 Series Check valve: FUJIKIN O-Ring seal type Hand valve: FUJIKIN: Diaphragm type Regulator: VERIFLO SQ Series Pressure transducer: NAGANO ZT 17 Others: Joint: Gasket type: Pure nickel type Piping material: SUS316L Up tube Piping working method: Welding Welding methods: Automatic welding Gas exhaust system: Dry pump: EBARA A150W-T Main valve: MKS 172-1080P Vacuum gauge: MKS Baratron sensor normal type Joint: Gasket JIS Method Piping material: SUS316BA, stainless steel APC: MKS 253B-3-80-2, butterfly valve VG1: 0 to 10 Torr, Normal type VG2: 0 to 1000 Torr, Normal type VG3: ULVAC GP-2A, Pirani gauge Manifold: Structure: Sealing method: End point sealing Material: SUS316L Stainless steel Port: Gas port: 3/8" Ultra torr Inner T/C port: 20DAI Ultra torr Exhaust port: 3 DIA Cooling method: Water cooling Safety Interlock: Gas flow low MFC: Too low gas flow Alarm: > 5% Abort: ± 10% Gas flow high MFC: Too high gas flow Alarm: > 5% Abort: ± 10% Low PCW flow: No PCW supply Alarm: > 3min Abort: > 5min Heater break down: > 7min PCW Leak detection: Alarm Process heater over temperature: Chamber over heat Heater break down: > 3 sec Furnace area over temperature: Alarm Heater break down: > 3 sec SCR Area over temperature: Alarm Heater break down: > 3 sec Interruption of electric power: Alarm Abort: < 3 sec Heater break down: > 3 sec Gas flow sequence: Alarm Pump off: Alarm Pump trouble: Alarm Pressure low (reactor tube pressure): Alarm Pressure high (reactor tube pressure): Alarm Leak check (reactor tube pressure): Main valve off delay: 10 min Abort: > 20mTorr Currently warehoused 1997 vintage.
  • TEL ALPHA 858SCE

    TEL: ALPHA 858SCE

    Furnace, 8" Configured for vacuum annealing of metals Plumbed for nitrogen, hydrogen, and forming gas Equipped with TS-4000Z controller and Ebara A70W vacuum pump 1996 vintage.
  • TM VACUUM PRODUCTS: SS1213 III

    Vacuum furnace 12" x 12" x 20" deep work area 2400°F maximum temperature, Moly Hot Zones Diffusion pumped Cooling fan Honeywell controls.
  • KOKUSAI: DJ-815V

    Diffusion Furnaces.
  • KOKUSAI: ALDINNA DJ-1206VN-DM

    Atomic Layer Deposition system, 12" ALD: SiN 2008 vintage.
  • THERMCO: RANGER 3

    Stack Furnace, 4" 6" - 7" Bore 208v 3 ph 60hz 45 KW 126 amps.
  • BRUCE BDF-41

    BRUCE: BDF-41

    Stack oxidation CVD furnace, 6" Garden variety (2) Tube PolySi CVD (2) Tube LPCVD 1992-1993 Vintage.
  • MRL: 8TFA-107

    Green tape firing furnace With Delta F oxygen analyzer 8" Wide belt 107" Long hot zone (12) Zones LTCC 1997 vintage.
  • MRL SEQUOIA

    MRL: SEQUOIA

    furnace. Its a 8" tool with 10" tunnels. Was only run for 2 days. Has been warehoused for 3 years.
  • TEL: ALPHA 805

    oxidation furnace, 8", as is, 1996 vintage.
  • MRL: MINI-MAX THERM-O-DISC

    Tube furnace, 8" Bench top.
  • KOKUSAI: DD-853V

    Wet oxide furnace.
  • TEL: VCF615

    LPHTO vertical furnaces.
  • CENTROTHERM DO-FF-HTO-12.500-300

    CENTROTHERM: DO-FF-HTO-12.500-300

    Fast firing furnaces Venturi nozzle FF Heating cassette Cooling cassette Power control Process control system Operating panel Exhaust air condenser (top mount) Condensate tank Main Parts: Conveyor Belt Tightener Drive Unit Rollers Conveyor Belt Cleaner Ultrasonic Cleaner (U-Cleaner) Brush Cleaner 2011 vintage.
  • KOKUSAI: DJ-823V-8BL

    HTO furnaces, 8" 1995 vintage.
  • KOKUSAI: DJ-835V-8BL

    L/L nitride furnace, 8" 1998 vintage.
顯示 每一頁
1 2 3 4 5 6 下一個