二手 AIRCO TEMESCAL FC 3200 #9195626 待售
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ID: 9195626
E-Beam evaporator
GE FANUC PLC Control system
Integrated cryo pump regeneration
Process recipe control
Data logging
On board flat screen integrated Windows PC
32” x 32” S/S Process chamber (Water cooled)
10.6" High speed flat planetary
Operator / Engineer computer interface includes:
Data logging of: Ion & convectron, valves & chamber heat
User level system control
Integrated cryo pump regeneration control
Process recipe editing
TELEMARK TT-6
Digital display
Programmable sweep control
6-Pocket electron beam gun
5kVA SCR Controlled transformer
Fixture to accept customer specified thermal evaporation boats
Feedthroughs for one restive thermal source
(2) Separate source shutters
(2) 2kW Heater assemblies with feed throughs
4kW Temperature control
(2) Ion / (4) Convectron gauges
VV-400 View port with shutter
PLC Closed loop pressure control through: 02 MFC / GRANVILLE PHILLIPS 354
CTI 400 Cryo pump with CTI 1020R compressor
PLC Controlled automatic regeneration
N2 Purge gas heater
Deposition rate monitor: MAXTEK 6 MHz quartz crystal sensor
Programmable:
For material density
Acoustic impedance
Tooling factor
(3) Planets:
(4) 4” Variable speed single plane planetary systems
(12) Wafers per run
LEYBOLD D-30, 2-stage direct drive 26cfm mechanical pump
Pump base pressure: 12 Micron or better
Includes:
Manuals
Schematics binder
Options:
Multi pocket E-beam source
(2) Large volume single pocket guns.
AIRCO TEMESCAL FC 3200蒸發器是為商用制冷系統設計的蒸發器。它由重型不銹鋼結構制成,塗覆在耐腐蝕的表面。蒸發器具有可移動的引擎蓋設計,便於訪問和維修。它配備了密封壓縮機,以提高設備效率和可靠性。蒸發器采用全鋁翅片管冷凝器和具有制冷劑電路交換技術的蒸發器,並結合機械膨脹和自然膨脹,以改善制冷劑的熱特性。FC 3200還配備了變速電動機和自動系統控制器(ASC),用於監視和控制設備,以提高精度和效率。它還包括一個內部過濾器盒,幫助保持水分和顆粒物從制冷機。蒸發器容量範圍廣泛,在4-36噸之間,適用於低溫應用。蒸發器也是UL認可和CUL上市的安全和質量保證.在工具部件方面,AIRCO TEMESCAL FC 3200采用密封壓縮機、全鋁鰭管冷凝器、具有制冷劑電路交換技術的蒸發器以及變速電動機和自動資產控制器(ASC)來監測和控制模型。在結構方面,它由重型不銹鋼制成,塗有耐腐蝕的塗層,並具有可移動的引擎蓋設計,便於進出和維修。它也是UL認可和CUL上市的安全和質量保證.最後,FC 3200設計用於低溫應用的商用制冷系統。其容量範圍廣泛,從4-36噸不等,提供出色的熱特性、準確性和效率。AIRCO TEMESCAL FC 3200憑借其密封式壓縮機和變速電機的可靠穩定性能,是商用制冷的理想選擇。
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