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394 結果發現: 用 Ion Implanters & Monitors

  • EATON NOVA / AXCELIS NV 10-160

    EATON NOVA / AXCELIS: NV 10-160

    High current ion implanters, 4"-6", missing parts 160 kV Includes: (2) Disks (1) Complete Ion Source (2) Cryo 10 (1) Diffusion Pump (3) Mechanical Pumps Computer and Custom Tables Spare assemblies Does not includes AT-4 loader De-installed.
  • SEN / SUMITOMO EATON NOVA NV10-90

    SEN / SUMITOMO EATON NOVA: NV10-90

    High Current Implater 2 EACH 5” WAFER FULL CLAMP DISC WITH NEW RGA COATING 90KV HIGH VOLTAGE MANUAL LOAD STATION WITH AIR FILTER HOOD VACCUM ARM LODAING FAST SCAN/E-SHOWER AND SUPPLY 7.12 VERSION SOFTWARE FOR END STATION NV-10 CONTROL CONSLE EMS POWER SUPPLY ( 90K) UP GRADE FILAMENT POWER SUPPLY ALL NEW TUBING FOR AIR , WATER, AND N2 NEW PAINTING FOR PANELS REBUILT PUMP PACKAGE TWO EACH CTI-8 CYRO PUMPS REBUILT SOURCE DIFFUSION PUMP OPERATION AND MAINTENANCE MANUAL.
  • VARIAN 350DE

    VARIAN: 350DE

    Mid current ion implanter, 4"-6" Set for Phosphine, BF3, and Arsine Standard configuration 1985 vintage.
  • VARIAN: 350D

    Ion implanter, 3"-4" Research cube end station.
  • VARIAN: 350DE

    Medium current implanter, 6".
  • THERMA-WAVE TP 3300

    THERMA-WAVE: TP 3300

    Ion implant measurement system.
  • VARIAN: 300XP

    Implanter, 8".
  • THERMA-WAVE DT-360
  • NISSIN: NH-20SDR

    Medium current ion implanter N2 DA 1993 vintage.
  • NISSIN: NH-20C

    Medium current implanters.
  • SEN / SUMITOMO EATON NOVA: NV MC3

    Mid current ion implanter, 8".
  • APPLIED MATERIALS 9500
  • NISSIN: EXCEED 2000

    Implanters 1997 vintage.
  • VARIOUS: LOT

    Lot of implanters: Make Model Description APPLIED MATERIALS Quantum III Ion implanter VARIAN E1000 Implanter APPLIED MATERIALS XR80 Implanter APPLIED MATERIALS 9500 Implanter VARIAN E500 Current implanter.
  • THERMA-WAVE: TP 420

    Ion implant monitor system, 8".
  • VARIAN 400-10D

    VARIAN: 400-10D

    Ion implanter Currently warehoused.
  • EATON NOVA / AXCELIS NV-GSD-HE

    EATON NOVA / AXCELIS: NV-GSD-HE

    High energy implanter, 8" Source module: Gas box: Gas line #1: HP(Ar) Tylan 2900 Gas line #2: HP (BF3) UNIT 8162 Gas line #3 : SDS PH3 MKS 1640A Gas line #4: SDS ASH3 MKS 1640A Isolation transformer type: Oil type Injector module: Source type: ELS / Non-vaporizer Extraction electrode type: 3-Axes electrode Bushing type: Red P1 Model: BOC EDWARDS STP-2000C RP1 Model: Ebara 40X20 dry pump Facilities module: Machine transformer select : Dry type (1) Triple loops chiller AFFINITY CWA-300L-VHE-3LP P/N:10185 (1) Disk chiller: AFFINITY RWA-012T-BE03CB P/N:7666 (2) CTI Cryogenic 9600 X2 compressors Linac module: P4: LEYBOLD Turbovac 1000C P5: LEYBOLD Turbovac 1000C RP2: EBARA 40X20 Dry pump (4) RFG-3000 (6) RFG-3001 FEM Module: FEM Power EMS:03-165-2-D P/N:00473110 EMS:03-165-2-D P/N:00473110 FEM Guss: P/N:1182890 Endstation module: IG1/IG3 Contoller: 307 Type controller IG3: Ion gauge tape: 274012 In-air controller type: 4-Axes DI A19077 Assy no:1520960 Robot controller type(Macobot controller): 4-Axes DI A42891 Assy no:1520960 Y-Scan controller type: 4-Axes DI P97801092 Gyro controller type: 4-Axes DI A06078 Assy No:1520960 P/N:1177580 Dose controller type: Universal B43017 Assy no:152060 Disk module: P2: CTI Cryogenic OB 8 P3: CTI Cryogenic OB 10 P9: CTI Cryogenic OB 250F RP4: EBARA 40x20 Dry pump Flag faraday: Standard Disk model: Si coating Rotary motor type: Belt drive P/N: 152164 Vacuum cassette elevator type: GRTV Type not vespel X1 Notch/Flat finder: Flat Quad rack module:1178680 E/S Elec rack / Quad console module: 178580.
  • NISSIN: EXCEED 2300

    Medium current ion implanter.
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