二手 AMAT / APPLIED MATERIALS xR Leap #9174557 待售
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ID: 9174557
Ion implanter, 8"
Main components:
Processor module
Beamline module
Source services module
Processor rack
Heat exchanger / PDU
Mobile PC & desk
Clean room PC
Enclosure
Signal tower
TEM Probe
No VESDA smoke detector
ISO TX
Mains matching TX
Beamline, controllers PSU's and assy:
Pre accelerator / Mag controller
Beamline inst
Vacuum controller
Post A controller
Turbo controller
Focus PSU
Decel PSU
A Mag PSU
Pre A converter PSU
Source mag PSU
Suppression PSU
Beam path components, source / Extraction / Flight tube / MRS and PFS assy:
Source head type: IHC
Extraction type: Dual bellows
Flight tube
MRS
Pre defining
PFS Type: HD PFS
Gas cabinet (Source services):
PH3 Module: SDS
AsH3 Module: SDS
Boron: HP
Ar: HP
Purge module
PSU's, Controllers and assy:
Gas and temperature control
Filament PSU
Arc PSU
Bias PSU
DPS
Pre A HV stack
G2 PSU & Components
Vacuum system:
Make / Model / Description
SEIKO SEIKI / STP-1000 / Source turbo pump
SEIKO SEIKI / STP-450 / MRS turbo pump
CTI / OB-10 / Side cryo pump
CTI / OB-10 / Rear cryo pump
Processor PSU's controller and assy:
Wheel & components
Spin motor
Gripper
Transfer arm
Clip actuator
Blade
A/B Sensor
Tilt assy
PFS DP Box
Beam stop
Beam profiler
Filament PSU (PFS)
Wafer loader / Mini environment assy:
Carousel
Indexer
W/L Door
Orientor
Cassettes / Trays
Arm servo PSU (XR80)
Arm servo cont (XR80)
ISO TX 9500
Post A:
No HV stack
No converter PSU
No controller
Control rack:
DAQPDU
Option chassis
Target sys inst
W/L Cont
W/L Vacuum
Ground PDU
Target sys vacuum
Spin / Scan cont
Direct drive interface
Plasma flood chassis
Scan amp
Spin amp
Spin / Scan PDU
Bleed resistor
Motech 80
VME:
CPU Main board
Loop cont
Energy level: 0.2-80 keV
1996 vintage.
AMAT/APPLIED MATERIALS xR Leap是一種先進的離子植入器和顯示器,用於半導體制造過程。它旨在將高精度、超高速的摻雜劑植入基材中,用於制造半導體器件。它利用先進的軟件和硬件解決方案來提供最高級別的準確性,同時還為客戶提供各種定制選項,使其能夠根據自己的特定需求定制解決方案。AMAT xR Leap具有直觀的圖形用戶界面、雙束離子源技術、固定磁場和先進的磁性絕緣能力,以確保高精度植入速率和粒子密度。集成的監控設備允許實時測量和質量控制,而可選的數據采集系統,加上2D圖像采集和分析軟件套件,確保了該過程高度自動化和可追溯。該裝置還提供雙級梳子驅動技術,用於高精度光束掃描和同時植入多種植入物。它還能夠達到250W劑量水平,其高效的電子冷卻技術保證了低水平的植入後能量提升。此外,APPLIED MATERIALS xR Leap機器具有很高的可擴展性,可適應不同級別的植入率、光束不靈敏度和電壓控制。它還配備了先進的硬件和軟件診斷,使技術人員能夠監控和維護工具的整體性能。XR Leap內置的安全功能使其成為要求最苛刻的半導體制造過程中更為可靠的選項,有助於最大限度地降低維護成本、減少停機時間並優化效率。此外,該資產易於定制和安裝,使其成為各種行業的理想選擇。
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