二手 ACCRETECH / TSK AD-2000T #9187561 待售
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ID: 9187561
晶圓大小: 12"
Dicing saw, 12"
Frames and cassettes:
12" Infineon frame C66365-A0034-C068-03-0006
12" Infineon frame C66365-A0034-C068-03-0006
12" ePAK Resources EFF12-300-3,5-EM-59
12" Disco frame DTF2-12-1
12" Frame magazine metal (Infineon standard)
Accuracy:
Kerf off-center: < 5 µm (6σ)
Kerf off-center Y1 to Y2 axis: < 3 µm (6σ)
Z-Axis repeatability: < ± 1µm (6σ)
Non contact set-up repeatability: < σ 2 µm (6σ)
Difference between chuck set-up and non-contact set-up: Max 4 µm (6σ)
Y-Movement (Y-axis for 1st and 2nd spindle):
Closed loop system
Effective stroke of each axis: min 310 mm
Indexing setting range:
0,0001 (0,1µm) to 310 mm for Y-axis and for y-axis.
Cumulative indexing error: < 3µm (6σ) at full range of 310mm (Y1-axis)
Single indexing error: < 2µm (6σ) at full range of 5mm
X-Movement:
Effective cutting stroke: 310mm
Stroke setting range: 1" - 12"
Programmable cutting speed: 0,1 to 300mm/s
Back movement speed 1000mm/s
X-Axis straightness: < 3 µm (6σ) /310 mm
Perpenticularity between X-axis and spindle shaft: < 8 arc sec (6σ) (1 arc sec = σ / 180 x 3600)
Perpenticularity between X- and Y- axis: < 10 arc sec (6σ)
Z-Movement:
Minimum step: 1 µm (6σ)
Effective stroke: > 14 mm (2" Blade)
Z-Axis speed: 50.0 mm/sec
Z-Axis repeatability: σ 1 µm (6σ)
Theta-movement:
Rotation angle: 0° - 320° CW and 60°CCW from initial point
Rotation speed: 45°/sec
Repeatability: ± 2 arc sec (6σ)
Closed loop system
Spindle:
Temperature stable spindle
Output: 1800W
Rotation speed: Up to 60.000 rpm
Dynamic vibration measured on any point of the spindle: Up to 55.000 rpm: < 0.5 µm
Blade connection: ¾"
Si-wafer cleaning system:
Atomizing nozzle at cleaner (N2/DI water)
Rotation range: 100 to 3000 rpm (Programmable)
Time setting: 1 - 999 sec (Programmable)
Stop position accuracy: ±1°
Voltage: 210 VAC ± 6%
3 Phase
50 Hz ± 1%
Compressed air pressure:
0,5 to 0,8 MPa
350 NL/min
N2:
0,5 to 0,8 MPa
200N L/min
Wheel coolant / Spinner cleaning water / Water curtain:
0,2 to 0,4 MPa
14 L/min
Spindle coolant:
0,2 to 0,4 MPa
3,0 L/min
Rinsing water:
0,2 to 0,4 MPa
1,0 L/min
Duct capacity >5 m3/min.
ACCRETECH/TSK AD-2000T Scribing/Dicing Equipment是處理半導體晶圓和其他基板的高精度工具。該系統的設計目的是能夠在劃線和切割應用中精確切割這些材料。TSK AD-2000T具有高速切割頭、物料支持表和先進的閉環控制單元,可提供高精度和可重復的結果。該機由五軸切削頭組成,最大進料速率為4500mm/秒,線性水平切削速度為300 mm/秒,以及XYZ線性表,可容納尺寸可達900mm的基板。切削頭的設計是為了在基板上準確、快速地塗抹超精細的精密點、線條和形狀。直線軸由直流直流伺服電動機和先進的運動控制工具驅動,即使在處理基板中最小的特征時,也能使資產提供高精度、重復性和速度。ACCRETECH AD-2000T還具有閉環控制模型,可確保對材料進行精確塗抹和切割。該設備可與不同類型的刀片配合使用,包括金剛石劃線刀片、硬質合金刀片和激光切割頭。此外,AD-2000T還可以配備可選的視覺和圖像處理系統,以進行糾錯和改進流程功能。ACCRETECH/TSK AD-2000T還配備了一套高級軟件工具,用於易於重復的部件編程。該軟件提供了一套全面的CAD/CAM功能,包括2D和3D繪圖、編輯、嵌套和3軸圖形模擬。這使用戶能夠快速、精確地在scribing和dicing應用程序中對設備進行編程。此外,TSK AD-2000T的閉環控制機器確保了安全的工作環境和與用戶流程的無縫集成。這樣可確保提高流程的性能和可重復性。ACCRETECH AD-2000T結合了先進的硬件和軟件,提供了一種高效可靠的工具來處理劃線和切割應用中的基板。
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