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ID#: 195781 製造商: ASM 模型: A 600 UHV 類別: DIFFUSION FURNACES & ACCESSORIES 設備詳細信息: Selective deposition LPCVD systems, 8" Process: SiH4 / Ph3 anneal, (2) chambers Software version: Windows NTVer.4.0 Service Pack 4 OS9 Ver.3.03 Vacuum pump included 1999 vintage.
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