二手 BRUCE BDF-41 #9037521 待售

Tube furnace Includes: Scavenger/furnace: (10) Type-S Spike Thermocouples per tube level Individual tube level scavenger boxes with damper adjustment Cooling air exhaust bonnet (4) Intempos temperature control modules (1 per tube level): (2) Atmospheric standard temperature (1250º C Maximum) 5-zone heating elements (2) LPCVD 5-zone heating elements Load station: (4) Heavy duty boat loaders (Model: 7680) (4) Multi-axis saddles (4) Atmospheric door support assemblies with quartz doors Class 10 HLF Load station with type 2 HEPA filters Source cabinet: Tube level configuration: Tube 1 (top): Open Tube 2: Internal pyrogenic oxidation Tube 3: LPCVD Low stress nitride Tube 4 (bottom): Open L-shaped gas cabinet with vertically mounted gas panels Tube foyer with independent exhaust Gas inlet assemblies with shutoff valve Regular, gauge, filter and manifold drops (316 L tubing) Micro-T weld and VCR fittings Process gas lines configured with no tubing bends Quartz kit for pyrogenic oxidation tubes: SiC paddle, quartz process tube, quartz door, profile T/C and 8-quartz boats per tube Quartz kid for nitride tubes: SiC paddle, quartz process tube, profile T/C and 8-quartz boats Control cabinet: (4) 7355 DC Microcontrollers (4) 7680 Boat loader control modules 7355 DCC configured with 7355X firmware Control cabinet with casters System alarm panel.