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ID#: 104721 製造商: TEL / TOKYO ELECTRON 模型: ALPHA 8S 類別: DIFFUSION FURNACES & ACCESSORIES 設備詳細信息: High-temp furnace, 8"
Process: Oxide
8 cassette stockers
Frequency 60 Interface.-Cassette ¡V 8"-Phase -3 Voltage, 208V
Facilities entry at bottom
Wide Body style, Right sided
Brooks 5964 MFCs
MFC 7 HCl 1 slm
MFC 6 O2 1 slm
MFC 5 O2 20 slm
MFC 4 H2 10 slm
MFC 3 Ar 20 slm
MFC 2 N2 5 slm
MFC 1 N2 20 slm
TS-4000SZ Furnace controller
Varian TEL LR300 Temperature controller
AP Tech O2 and H2 flow switches
HEL Pyro Control
Touch screen operator interface
Load Size 100 wafers-(upgradeable 150)
1200 C Heater Core
Lip Seal, Inner T/C, Linear aligner UP/DOWWN axis slide motions
No variable pitch. Single or five (5) wafers
Boat, CLN ON 07-00202
Cover, Pedestal 07-00204
Pedestal 07-00205
PFA tube (6.35x4.35x1.0T) 06-22014-00-16 inch process Tube
Rapid Cooling
System power rating: 3 Phase, 208 V, 60 Hz
1994 vintage.
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