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ID#: 190957 製造商: TEL / TOKYO ELECTRON 模型: ALPHA 8S 類別: DIFFUSION FURNACES & ACCESSORIES 釀造的: 1996 晶圓尺寸: 8" 設備詳細信息: Nitride furnace, 8" Specifications: Process: Nitride Software version: TS-4000-1996 Power: 110AC One Phase / 208 AC 3Ph Loading configuration: 6 loader Main system: TS4000 Controller Photohelic Gauge Boat Elevator Wafer Load Automation 16 Cassette stocker Temperature Controller (M121) Furnace Monitor, Power Control Unit Remote Utility & Gas Cabinet Inner T/C for Ration Mix HCL Detector Auto Shutter Gas system (NH3, DCS) Options: (1) Signal Tower (2) Pitch Change Mechanism (3) UPS (4) GEM Communication N2 Load Lock Ambient Control Option Load size 170 wafers Load lock purge system Process gas NH3, DCS Gas Type - Convention Gas System Tubing material - Stainless steel Tubing Finish - Electro-polish Manual valve - Fujikin Fitting Type - VCR/UJR Air-Operated valve - Fujikin Filter - Millipore Regulator - Veriflo MFC - Aera Pressure transducer - Millipore or NAGANO 1996 vintage.
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