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ID#: 62757 製造商: TEL / TOKYO ELECTRON 模型: ALPHA 8S 類別: DIFFUSION FURNACES & ACCESSORIES 釀造的: 1997 晶圓尺寸: 8" 設備詳細信息: Diffusion doped poly furnaces, 8" LPCVD Phosphorus Doped Poly process configuration 150 production wafer load size TS4000Z system controller 440 V power requirement Boat rotation Tape heater and associated control Remote gas detection Exhaust monitors Tylan General throttle control Ulvac GP-2ARY vacuum monitor Gas System UHP N2 2x N2 10%Ph3/He SiH4 ClF3 1997 vintage.
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