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ID#: 115121 製造商: TEL / TOKYO ELECTRON 模型: ALPHA 8SE-Z 類別: DIFFUSION FURNACES & ACCESSORIES 釀造的: 2000 晶圓尺寸: 8" 設備詳細信息: Vertical Anneal Furnace, 8"
Model: A8SE-ZAR
Process : LT Forming Gas (H2 Anneal - Reflow -Beol)
Standalone Furnace with Tunnel Layout and Non Shared Gas Cabinet
2 Loader Ports
NON-SMIF
Low Temp Heating Element
5 Zone
Heater Type : VMM-40-104
Waves Controller
AERA MFC's
N2 Loadlocks
No Boat Rotation
Wafer Capacity - 170 Total, 150 for Production run
208VAC
50/60hz
3 Phase Wiring
2000 vintage.
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