二手 TEL / TOKYO ELECTRON Alpha 8SE #144024 待售
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ID: 144024
TiN Furnace, 8"
System configuration:
(Qty.)System Hand LL
System Paint Color White
Furnace Front Surface Finish Painted
Process Pressure 500 mTorr
Process Temperature ( C ) 800C
FTP Heater Installed
Rapid Cooling Unit Installed
Heater Type FTP VOS-40-017 (RT)-1000C
N2 Purge System Installed
02 Densimeter Model NGK SH-302
SMIF Not Installed
SMIF POD (maker/model) N/A
SMIF OEM Probe (maker/model) N/A
AGV Compatibility Not Installed
Process Gasses
Process Gas 1 Pure N2
Process Gas 2 NH3
Process Gas 3 H2
Process Gas 4 ClF3
Process Gas 5 TiCl4
Gas Distribution System
Basic Style Integrated Gas System Rail Type (Fujikin)
Tubing Material Stainless Steel
Tubing Finish Electro-polish
Manual Valve FUJIKIN
Air-Operated Valve FUJIKIN
Filter Millipore
Regulator Veriflo
MFC STEC SEC-7350 (Analog)
Press. Transducer Veriflo
Press. Transducer Display Reference Compound
External Torch Unit N/A
Baking System - Burn Out Unit Not Installed
Vaporizer N/A
Liquid Source Auto-Refill N/A
Auto-Refill Provided By N/A
Auto-Refill Tubing Interconnect By N/A
Auto-Refill Power Provided By N/A
Gas System Schem. Dwg/Parts List 2109-323548-13
Panel Heater for Furnace Opening N/A
Vacuum System:
Vacuum Pressure Controller CKD-VEC
Trap Not Installed
Pump-FNC Vac Tubing Provided By Customer
Manifold Heater Not Installed
Water/Cassette Handling
Wafer Type 200mm SEMI STD - Notched
Wafer Notch/Flat Aligner Installed
Cassette Type
Cassette-Number of Wafers 25
Cassette Storage Qty. 21
Monitor Cassette Operation
Cassette In-Out Sequence
Transfer-stage Protrusion Sensor Installed
Fork Type/Material 1+4
For-Wafer Presence Sensor Installed
Fork-Wafer Position Sensor or Guide Not Installed
Fork-Variable Pitch Installed
Boat/Pedestal
Boat Rotation Installed
Cap Heater Installed
System Controls
System Controller WAVES
Remote MMI and Gas Flowchart Not Installed
Signal Tower/Colors Red/Yellow/Green
Signal Tower Location(s)) FNC Front
General Pressure Display Units PSI
Cabinet Exhaust Display Units Pa
Temperature Control
Furnace Temperature Controller M-560A
Gas Leak Detection
Gas Detection Provided By TEL
Gas Detection System Maker Riken
Gas 1 Detected/Point H2 U/Box
Gas 2 Detected/Point NH3 U/Box
Gas 3 Detected/Point ClF3 U/Box
Customer I/F Ctrl. Handshakes
Other Options and Specials Not Installed
Bar Code Reader (maker/model Not Installed
Other Options and Specials
Bar Code Reader (maker/model Not Installed
Chemical Pre-filter Not Installed
Rapid Ionizer (maker/model) Not Installed
Equipment Layout & Facilities
Furnace Exhaust Connection Point Top Connection
Cooling Water Connection Point Bottom Connection
Incoming Gas Connection Point Top Connection
Gas Unit Exh. Connection Point Top Connection
Facility Elect. - Equip. Per Input
Voltage 3phase 480V
Voltage1phase 120V
Ctrl Pwr UPS make/model No UPS
UPS Input Voltage/Output Voltage N/A
Step Down Transformer (Outside) 480V In 100V/200V Out
2003 vintage.
TEL/TOKYO ELECTRON ALPHA 8SE是一種擴散爐及附件,用於半導體基板的精確熱處理。特別用於源/排水開發和退火目的。該爐采用TEL先進的直線型高效加熱工藝,可實現精確的溫度控制,具有良好的均勻性和溫度響應。TEL ALPHA-8SE擴散爐配備了高質量的多渠道輸送系統,多基板裝載能力大。該工藝室能夠同時進行標準大氣和真空處理,以及通過可選的原位氣體噴射器進行大氣控制。TOKYO ELECTRON ALPHA-8 SE的高溫範圍允許廣泛的工藝要求,雙區設計允許精確控制溫度和大氣優化。ALPHA 8 S E還附帶先進的數字控制系統,對過程參數,如溫度、壓力和緊急停止設置給予精確可靠的控制。此外,Auto-Observe feature as standard允許用戶在過程中監視過程參數並進行原位調整,以優化均勻性。流程監視器還捕獲可用於統計流程控制(SPC)和分析的歷史流程數據。此外,TEL Alpha 8SE還配備了標準的安全功能,包括物理和電子功能。安全聯鎖使操作員無法進入爐子和轉移系統,並在出現異常情況時提供緊急停止。其他防護設備包括空氣過濾系統,使加工室不受加壓,以及耐熱橡膠塗層,為室門提供隔熱。總體而言,TEL/TOKYO ELECTRON ALPHA 8S-E擴散爐及其配件是先進熱工藝的絕佳選擇。它提供了廣泛的功能,從基本過程標準化到完全自動化,並確保安全和過程可靠性。先進的一攬子解決方案有助於提高流程一致性,同時數字控制系統簡化數據采集和分析。所有這些特性和優點使TOKYO ELECTRON ALPHA 8S-E成為一種功能強大、用途廣泛且可靠的工具。
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