二手 TEL / TOKYO ELECTRON Alpha 8SE #144024 待售

看起來這件物品已經賣了。檢查下面的類似產品或與我們聯系,我們經驗豐富的團隊將為您找到它。

TEL / TOKYO ELECTRON Alpha 8SE
已售出
ID: 144024
TiN Furnace, 8" System configuration: (Qty.)System Hand LL System Paint Color White Furnace Front Surface Finish Painted Process Pressure 500 mTorr Process Temperature ( C ) 800C FTP Heater Installed Rapid Cooling Unit Installed Heater Type FTP VOS-40-017 (RT)-1000C N2 Purge System Installed 02 Densimeter Model NGK SH-302 SMIF Not Installed SMIF POD (maker/model) N/A SMIF OEM Probe (maker/model) N/A AGV Compatibility Not Installed Process Gasses Process Gas 1 Pure N2 Process Gas 2 NH3 Process Gas 3 H2 Process Gas 4 ClF3 Process Gas 5 TiCl4 Gas Distribution System Basic Style Integrated Gas System Rail Type (Fujikin) Tubing Material Stainless Steel Tubing Finish Electro-polish Manual Valve FUJIKIN Air-Operated Valve FUJIKIN Filter Millipore Regulator Veriflo MFC STEC SEC-7350 (Analog) Press. Transducer Veriflo Press. Transducer Display Reference Compound External Torch Unit N/A Baking System - Burn Out Unit Not Installed Vaporizer N/A Liquid Source Auto-Refill N/A Auto-Refill Provided By N/A Auto-Refill Tubing Interconnect By N/A Auto-Refill Power Provided By N/A Gas System Schem. Dwg/Parts List 2109-323548-13 Panel Heater for Furnace Opening N/A Vacuum System: Vacuum Pressure Controller CKD-VEC Trap Not Installed Pump-FNC Vac Tubing Provided By Customer Manifold Heater Not Installed Water/Cassette Handling Wafer Type 200mm SEMI STD - Notched Wafer Notch/Flat Aligner Installed Cassette Type Cassette-Number of Wafers 25 Cassette Storage Qty. 21 Monitor Cassette Operation Cassette In-Out Sequence Transfer-stage Protrusion Sensor Installed Fork Type/Material 1+4 For-Wafer Presence Sensor Installed Fork-Wafer Position Sensor or Guide Not Installed Fork-Variable Pitch Installed Boat/Pedestal Boat Rotation Installed Cap Heater Installed System Controls System Controller WAVES Remote MMI and Gas Flowchart Not Installed Signal Tower/Colors Red/Yellow/Green Signal Tower Location(s)) FNC Front General Pressure Display Units PSI Cabinet Exhaust Display Units Pa Temperature Control Furnace Temperature Controller M-560A Gas Leak Detection Gas Detection Provided By TEL Gas Detection System Maker Riken Gas 1 Detected/Point H2 U/Box Gas 2 Detected/Point NH3 U/Box Gas 3 Detected/Point ClF3 U/Box Customer I/F Ctrl. Handshakes Other Options and Specials Not Installed Bar Code Reader (maker/model Not Installed Other Options and Specials Bar Code Reader (maker/model Not Installed Chemical Pre-filter Not Installed Rapid Ionizer (maker/model) Not Installed Equipment Layout & Facilities Furnace Exhaust Connection Point Top Connection Cooling Water Connection Point Bottom Connection Incoming Gas Connection Point Top Connection Gas Unit Exh. Connection Point Top Connection Facility Elect. - Equip. Per Input Voltage 3phase 480V Voltage1phase 120V Ctrl Pwr UPS make/model No UPS UPS Input Voltage/Output Voltage N/A Step Down Transformer (Outside) 480V In 100V/200V Out 2003 vintage.
TEL/TOKYO ELECTRON ALPHA 8SE是一種擴散爐及附件,用於半導體基板的精確熱處理。特別用於源/排水開發和退火目的。該爐采用TEL先進的直線型高效加熱工藝,可實現精確的溫度控制,具有良好的均勻性和溫度響應。TEL ALPHA-8SE擴散爐配備了高質量的多渠道輸送系統,多基板裝載能力大。該工藝室能夠同時進行標準大氣和真空處理,以及通過可選的原位氣體噴射器進行大氣控制。TOKYO ELECTRON ALPHA-8 SE的高溫範圍允許廣泛的工藝要求,雙區設計允許精確控制溫度和大氣優化。ALPHA 8 S E還附帶先進的數字控制系統,對過程參數,如溫度、壓力和緊急停止設置給予精確可靠的控制。此外,Auto-Observe feature as standard允許用戶在過程中監視過程參數並進行原位調整,以優化均勻性。流程監視器還捕獲可用於統計流程控制(SPC)和分析的歷史流程數據。此外,TEL Alpha 8SE還配備了標準的安全功能,包括物理和電子功能。安全聯鎖使操作員無法進入爐子和轉移系統,並在出現異常情況時提供緊急停止。其他防護設備包括空氣過濾系統,使加工室不受加壓,以及耐熱橡膠塗層,為室門提供隔熱。總體而言,TEL/TOKYO ELECTRON ALPHA 8S-E擴散爐及其配件是先進熱工藝的絕佳選擇。它提供了廣泛的功能,從基本過程標準化到完全自動化,並確保安全和過程可靠性。先進的一攬子解決方案有助於提高流程一致性,同時數字控制系統簡化數據采集和分析。所有這些特性和優點使TOKYO ELECTRON ALPHA 8S-E成為一種功能強大、用途廣泛且可靠的工具。
還沒有評論