二手 SVTA / SVT ASSOCIATES 440 S1 MBE #9230364 待售

Molecular Beam Epitaxy (MBE) system, 3"-4" SVT Silicon MBE epitaxial OMICRON Electronics included Method: Thin-film deposition of single crystals Transistor: Cellular phones & WiFi Load lock: Chamber with water cooling Quick hatch with O-ring seal & CF copper gasket option GP Model 204 gold seal valve (Roughing line) Sample heater: 200° C Heater power supply: 1000 W Dimension heater control loop Wafer cassette holder, 8" (8) MO Wafer holders, 8" Manual gate valve (VAT) (Between loadlock & intermediate chamber) HPS Series 421 cold cathode gauge & controller (Wide range) Cryopump UHV, 6" Gate valve: Cryopump, 4 1/2" (Pneumatic) (3) Sorption pumps with plastic dawars, heaters & manual valves PIBA Venturi pump with manual valve GP Model 275 convectron gauge with digital controller Vacuum plumbing for roughing Intermediate chamber: (2) Transfer rods: Growth chamber & outgas station Cassette storage elevator (Manual) Ion pump 400 1/8 with PERKIN ELMER 1500 digital controller Sublimator & controller (TSP) Gate valve: Ion pump, 8" (Pneumatic) GP Model 307 extended (3) gauge controllers with ionization gauge 10" Gate valve (Manual) between intermediate chamber & outgas station Rough plumbing with GP 204 gold seal valve (2) Viewports for docking Outgas station: Water cooled chamber with expansion port Viewport with shutter Stage Heater 1100° C with TC Heater power supply: 1000 W Dimension control loop Ion gauge Cryopump, 8" UHV Gate valve,10" (Pneumatic) for cryopump Rough plumbing with GP gold seal valve for chamber Rough plumbing with GP gold seal valve for cryopump Growth chamber: Dia chamber, 24" with water cooling Sample manipulator with Z-motion & 60 RPM rotation Passivated graphite heater, 4": 1100°C Heater power supply: 1000 W (7) Dimension control loops Ion pump 400 1/8 with PERKIN ELMER 1500 digital controller Sublimator & controller: Ion pump (TSP) VAT Valve, 8" (pneumatic): Ion pump Cryropump, 8" UHV Cryropump compressor run (3) UHV pumps, 8" Gate valve, 10" (pneumatic) for Cryropump GP Model 307 Ion gauge controller & gauge (2) Thermionics 156 cc single pocket E-gun with pneumatic activated soft shutter & water shroud L-H 4x7cc Pocket E-gun with pneumatic activated soft shutter & water shroud 15 kW E-beam power supply with (3) sweeps (4) Standard 20cc (K-Cells) effusion cells (2) High temperature 10cc (K-Cells) effusion cells (4) Power supplies 1000 W for Std K-cells (2) Power supplies 1600 W for high temperature K-cells (6) Water cooled effusion cell shrouds with pneumatic activated soft shutters (10) Loop dimension multi-loop controllers with relay & CPU interface SVT Shutter controller (2) Sentinel III flux sensors & X'tal sensor with additional beam splitter Sentinel III deposition controller RHEED System with power supply, shutter, screen, lead window, & controller Option: VIEETECH 30 key / KIMBALL PHYSICS 20 kev RGA UTI-l00C System with TEKTRONIX 5111A scope & 5A 15N & 5B1 on plugins Movable ion gauge: Flux control Master shutter (Pneumatic) Rough plumbing & gold seal valves: Cryropump Bakeout heaters, timer, fans & soft blanket Viewports & shutters required: Docking & E-guns (Reference port schedule) (2) Implanter port soft shutters System upgrade chambers, 8" / Manipulator, stages & valves (6) PBN STD Crucibles (2) Hi-temp crucibles CPU 386/20 MHz IBM Compatible with hardware Water distribution panel System console Rough plumbing with GP gold seal valve for main chamber Gate valve, 10" (Manual) isolate growth chamber from intermediate chamber.