用 VARIAN / VEECO GEN II #9194612 待售的

ID#: 9194612

製造商:

VARIAN / VEECO

模型:

GEN II

晶圓尺寸:

3"

設備詳細信息:

MBE Growth system, 3"
AlGaAs Laser
InGaAsP

Vacuum:
Growth chamber (GC)
Triode ion pump: 400 l/sec
Buffer chamber (BC)
Triode ion pump: 200 l/sec
(2) TSP Controllers
Loadlock chamber (LC)
(100) CTI Cryotor cryopumps
(2) Vacshorption pumps
Ventury pump

In situ and calibration tools:
RHEED System: 0-10 keV
RHEED Oscillation growth rate calibration system

Cells:
EPI
Valved cracker with valved controller
Cable
Riber three zone
P Valved cracker with valve controller
Power supply
(3) 400g Sumo cells Ga, In, Al
(2) Dopont cells

Dual electronic equipment rack, 19"
(12) Solenson DC power supplies
2704 Dual channel
Eurotherm controller
Substrate and heated station
(2) DC Power supplies
Substrate heater
Heated station

Other tools:
Ircon optical pyrometer
Growth chamber and beam flux
(2) GP Ion gauge controllers
Buffer and loadlock chamber
RHEED Power supply
RGA Power supply unit
TEK Scope
Riber P valved cracker valve controller
Riber P cracker power supply
Pyrometer port heated
Substrate manipulator controller
Loadlock chamber
Lamp power and controller
AGILENT / HP / HEWLETT-PACKARD / KEYSIGHT Chart record mounted
RHEED Oscillation recording
Trolley for substrate handling.
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