二手 DNS / DAINIPPON 80A #9133638 待售

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DNS / DAINIPPON 80A
已售出
製造商
DNS / DAINIPPON
模型
80A
ID: 9133638
Scrubber Top side spin (1) Brush scrub Brush material: Mohair brush or PVA brush Brush contact distance: +1mm to -5mm max from wafer surface (adjustable at unit of 0.01mm) Brush revolutions: 440 rpm/60Hz, 380 rpm/50Hz (allowance of revolutions: ±10% max), non-rotation also settable Brush cleaning function: DI water washing at the brush standby zone by straight nozzle (1) Nano spray nozzle scrub Nozzle scanning scrub by high pressure DI water/N2 Nano nozzle angle: Approx 90 deg. to wafer surface (1) Nano nozzle Filter PALL DFA-4201 NIEY 0.1um (1) DI water rinse Filter PALL DFA-4201 NIEY 0.1um Flow meter: Max. 1000 ml/min (1) Back rinse Filter PALL DFA-4201 NIEY 0.1um Flow meter: Max. 200 ml /min (1) Brush cleaning Filter PALL DFA-4201 NIEY 0.1um Flow meter: Max. 1000 ml /min Back Side Spin Scrubber Specification: (1) Brush scrub Brush: 0.1mm Nylon or PVA brush Brush contact distance: +1mm to -5mm max from wafer surface(adjustable at unit of 0.01mm) Brush revolutions: 440 rpm/60Hz, 380 rpm/50Hz (allowance of revolutions: ±10% max), non-rotation also settable Brush cleaning function: DI water washing at the brush standby zone by straight nozzle (1) D-sonic nozzle Nozzle scanning scrub by D-sonic DI water Nozzle material: PP,PFA,PVDF Nozzle angle: Approx 90 deg. to wafer surface (1) D-sonic DI water nozzle Filter PALL DFA-4201 NIEY 0.1um (1) DI water rinse Filter PALL DFA-4201 NIEY 0.1um Flow meter: Max. 1000 ml/min (1) Back rinse Filter PALL DFA-4201 NIEY 0.1um Flow meter: Max. 500 ml /min (1) Brush cleaning Filter PALL DFA-4201 NIEY 0.1um Flow meter: Max. 1000 ml /min Spin motor specifications (Top Side Unit): Motor: brushless servo motor Revolution: 0 rpm to 4000rpm (subject to load of 150mm silicon wafer) Max. acceleration: 50000 rpm/s (subject to load of 150mm silicon wafer) Accuracy: ±1.5 rpm Max. revolutions: 9990 rpm(motor individual) Spin Motor Specification:(Back Side Unit) Motor: brushless servo motor Chuck pin : PEEK Revolution: 0 rpm to 6000 rpm (subject to load of 150mm silicon wafer) Max. acceleration: 1000 rpm/s (subject to load of 150mm silicon wafer) Accuracy: ±1.5 rpm Max. revolutions: 9990 rpm(motor individual) Chuck positioning mechanism: driven by spin motor D-Sonic nozzle specifications: Ultrasonic output: Max 48 W (1.5 MHz) Output current: 0.3 to 0.9A DI water flow rate: 0.6 to 1.0 L/min (variable by needle) Other specifications: (1) DI water (1) N2 (1) Vacuum (1) Dry Air (2) Spin exhausts.
DNS/DAINIPPON 80A是一種用於各種集成電路元件的芯片制造過程中的光阻設備。它是一個單一、自成一體的平臺,提供對生產高性能、高產量半導體集成電路的過程至關重要的液晶抵抗化學、曝光光學、曝光後處理步驟。該系統包括一個汞弧燈,為單次或垂直雙次曝光提供高霓虹燈-氙線輸出。真空光學組件包含一個真空積分器,一個可調焦距間隔的可調聚焦冷凝器透鏡,偏振玻璃和虹膜隔膜。光學組件還包含一個「火花」指示指示器,可用於通過磨砂冷凝器透鏡觀察電弧放電。抗蝕劑化學方法采用水基溶液,具有無軟烘烤能力。這允許消除中間的開發步驟,從而提高吞吐量。抗蝕劑化學還具有對溫度、濕度和光線照射影響的主動校正功能。該單元還包含一個曝光後處理或PET模塊,旨在優化機器的性能。該模塊包含紅外能源和等離子體濾波器。等離子體濾波器減少了暴露的抗蝕層的排便,而紅外能量源加速了固化過程,有助於減少發育時間。可以使用其他PET組件根據特定的應用程序要求進一步定制該工具。DNS 80A光刻資產是一種全自動模型,設計用於生產高性能和高產半導體集成電路的光刻設備。它的設計采用了最新的光學和抵抗化學技術,以優化吞吐量和產量,同時提供了一個成功的過程必不可少的靈活性。
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