二手 DNS / DAINIPPON SK-2000 #118481 待售

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製造商
DNS / DAINIPPON
模型
SK-2000
ID: 118481
晶圓大小: 8"
優質的: 2003
Spin coater / Developer DUV track system, 8" Wafer flow direction: L-type Wafer type: Notch IF-B Spinner unit configuration: (2) Coaters B-ARC (2) Coaters (3) Developers Indexer: Left type Wafers: SEMI Standard wafers / Notch type Standard type (4) Uni cassettes Coater: SC1 (Unit 3) & SC2 (Unit 4): Includes: Cups EBR Function Resist lines: 8 Line Resist pump: PDS-105G-KPV4 Cup rinse function Back side rinse Cup rinse Pot rinse EBR (Edge bead removal) Prewet function SC3 (Unit 5) & SC4 (Unit 6): Cups: 1 Includes: EBR Function Resist pump: PDS-105G-KPV4 Resist lines: 4 Line Cup rinse function Back side rinse Cup rinse Pot rinse EBR (Edge bead removal) Prewet function Bake: HP: (6) Units (8, 9, 11, 12, 17, 18) RHP: (8) Units (25, 26, 28, 29, 31, 32, 35, 36) CP: (7) Units (7, 10, 16, 24, 27, 30, 34) AHL: (3) Units (13, 14, 15) EEW: Unit (33) Developer: SC1 (Unit 3) & SC2 (Unit 4): Cups Developer number nozzle DIW Rinse nozzle Back side rinse line Flow meters with sensor: DEV, DIW1, DIW2, Back-side rinse, ORG, FWD Includes: Dev1 Prewet DIW1 Back side rinse TR Includes: TR1 Arm TR2 Arm TR3 Arm Others: Thermo controller model: CET-CU, Mass 7kg THC Model: SPC-2313-UC-A CP Controller model: FRD-A200-UC HMDS Supply type: Quart bottle to buffer tank Thinner supply type: Canister tank Developer supply type: Facility supply EEW: Unit (33) Lamp house type with lamp house Miscellaneous: Signal tower lamp: 3 Color (Red, orange, green) Sub module configuration: Source bottle cabinet SC Cabinet ETU Cabinet Controller cabinet IFB ACU Cabinet Input power supply box Main gas valve close Gas (Air, N2) line purge Chemical (Developer, DIW) line purge Drain PCW end capping Gas line (N2) end capping Chemical (Developer, DIW) line end capping Spin unit (Coater & developer) exhaust line caping Bake unit exhaust line caping Leak check Main power: 3 Phase, 200 V, full load 20.44 kVA, 59A 50/60 Hz, 3 Wires and GND/PE Rating 400A, AIC 65kA, motor 8A 2003 vintage.
DNS/DAINIPPON SK-2000是為處理微細圖案而開發的高性能光刻膠設備。該系統采用獨特、先進、精確的攝像機成像裝置,旨在提供完美的配準和曝光控制,並允許使用各種光阻材料。為了獲得最佳曝光和最大的靈活性,可以使用接觸和投影工具。先進的接觸曝光工具可產生極高質量的圖像配準,在整個光掩模表面提供完全均勻的曝光。投影曝光工具旨在通過應用高精度光學機器來減少精細設備的失真,最終提高曝光精度、線性度和屈服度。該工具還提供高級功能,如亞微米分辨率、0.15微米最小曝光均勻性和曝光穩定性控制功能。亞微米分辨率保證了極小的光刻特征能夠實現極好的精度和細節。曝光穩定性控制功能不僅允許精確調整曝光水平,還允許持續時間,這對於一致的結果至關重要。該資產擁有超高溫曝光的高速模式,提高了吞吐量,減少了工藝時間。該模型的另一個特點是它能夠從單個光源切換曝光波長,從而能夠對不同的曝光類型使用多種靈敏度。關於DNS SK2000光致抗蝕劑設備,該設計對溫度變化具有很強的魯棒性,顯著降低了顆粒,提高了整體暴露可靠性。總體而言,此系統為需要超精細圖案的光刻應用提供了最佳解決方案。
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