二手 HITACHI S-9300 #9032647 待售

CD Scanning electron microscope, 8-12" Electron optical system: Electron gun: SCHOTTKY Emission source Electro magnetic lens: 3-Stage electromagnetic lens system with boosting voltage Objective lens: (4) Openings click stop Heated aperture is selectable / Adjustable outside the vacuum Scan coil: 2-Stage electromagnetic deflection Astigmatism correction via an 8-pole electromagnetic coil Magnification: 1000x to > 300000x Field control method: Continuously on for sample discharging at all voltages Wafer imaging ability; Entire surface of 8” (or 12”) wafer Depth of focus: >= 1.0 um at 80000x magnification Resolution: 3 nm (800V) Retarding / Boosting mode Hitachi probe tip Power: 208 V 60 Hz 6 kVA 1 Phase CD Measurement principle: Cursor and line profile measurement Optical microscope system: Image is monochrome CCD Camera Magnification is 110x Wafer imaging: X Coverage from 5 – 295 mm Y Coverage from 5 – 195 mm Notch down Field of view: 1.2 mm Accelerating voltage: 500 V to 1600 V, 10 V steps Probe current: 4~24pA Workstation: Model: HP B180L (9GB) O/S: Unix version HP-UX 10.20 Software version: 14.71 SECS / GEM Communication interface Dual XY HITACHI micro scale DSP Image processing BSE Mode functionality Multipoint measurement function Edge roughness function Automated image archiving function Wafer handling system: (2) Cassette holders / ergo flippers Convertible to 300 mm with conversion kit BRK-287006300 Water chiller unit Main unit: HV Controller Lens PS unit DEF PS Unit Laser receiver unit X-Axis laser unit Laser linear scale cover X-Axis excel precision PCB Y-Axis excel precision PCB STSensor PCB (R) STSensor PCB (R) STSensor PCB (L) Secondary electron detection: SE and BSE electrons Aperture ass'y Ion pump 1, Ion pump 2, Ion pump 3 & controller TMP1, TMP2 & controller Stage controller Display Unit: Display of SEM and OM images, GUI operation screen HP Workstation (B180L) Keyboard & Mouse FDD MO Disk drive System controller ECPU 263 Controller C-820A Controller 4500 COGNEX Controller NMEN Controller SIP Controller PSDISP Controller NSGVA Controller EOCONT Controller NOMAFC Controller STAGE EBSI100 Controller WT EBSI100 Controller EVAC EBSI100 Controller HV EBSI100 Controller AMHSIO Controller Power unit: NIP Board PS CN PCB UPS Unit Main power switch unit ION pump power supply unit Power distribution unit Transformer unit Port 1: Door case EFEM Unit: Robot ass'y Ceramic arm Prealigner Includes: Load port 1 Load port 2 WT Controller Chiller Option: Dry pump Missing parts: Display unit: SIP Board Cognex 4500 board LAN HUB unit HDD Currently de-installed 2001 vintage.