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ID#: 200148 製造商: VARIOUS 模型: LOT 類別: SPARE PARTS 設備詳細信息: Lot of spare parts: Part Number Description Quantity 0240-15410 KIT, RETROFIT DC CONN 300mm PVD 1 0020-70285 BLADE 8IN BUFFER FROG LEG 1 0240-26775 CONS KIT, 8IN VECTRA 1 0010-10475 THROTTLE VALVE 1 0010-75100 THROTTLE VALVE 1 0242-38327 KIT, THROTTLE VALVE DUAL SPR DIR DDR CP 1 0242-70519 KIT, PER PROCESS CHAMBER DI/O/AI/0 1 4509-0001 SENSOR 1 0190-35961 CALIBRATED OPTICAL SENSOR / CABLE 1 0010-20130 BLADE ASSY, 8IN BUFFER 2 0225-96467 DOOR SENSOR FOR 8IN CASSETTE PRESENT ASSY 1 0240-14009 PM KIT, 1 MONTH 7700 HVA VALVE 1 0015-00517 CLAMP, VESPEL HATCHED 150 1 0668-01258 CB MAG THERM IP 240VAC 10A 1 3320-01026 GASKET, 10 SFF OFC COP 1 0020-05162 STUD, CRYO / GATE VALVE W/ HEX SOCKET 1 0020-13770 STUD, CRYO / GATE VALVE W/ HEX SOCKET 1 0020-16136 STUD, CRYO / GATE VALVE W/ HEX SOCKET 1 3320-01027 RING, COPPER 25 XXXX-XXXXX COMDEL RF POWER SOURCE 13-56 MHZ 1 XXXX-XXXXX STEPPNG MOTOR 2 XXXX-XXXXX HIGH PERFORMANCE ION GAUGE 1 XXXX-XXXXX FIBER OPTIC CABLE 4 5010-01028 ADH LOCTITE 22251 1 3840-01013 TEFLON TAPE 1/4W 260L 1 0720-01998 AMP CONN 1 3880-01026 WASHERS 4 3300-01348 FTG FLANGE NWSO 1 1290-01146 BLUE CONN 4 1200-01034 RIY SOL STATE 240VAC 25AMP 1 1330-01014 STRAPS BLK 10 100208008 HOSE HX 150W D3 TU1 208/50-60 1 0050-27590 BLK H08/WTR RTN MANIFOLD 1 3700-01234 ORING ID 2.859 CSD.139 VITRON 1 0190-77167 INFINITY 2 0020-29781 PLATE, MTG, AC CONTACTORS,300M 1 0242-23655 KIT, DC/RF POWER SUPPY SUPPORT RAILS 0240-76475 KIT, ONBOARD CHAMBER 0010-20466 ASSY; HANDLER RIGHT /LEFT SIDE 0242-11748 KIT, HE WATER MANIFOLD, 2CHM 200MM 0240-13996 KIT, GAS PANEL 0242-87532 KIT, ALIGNMENT TOOL 0240-27184 KIT, 8IN 101 SHIELD CONS 0240-71325 KIT, CH.B COOL DOWN 0242-76244 KIT, VME STEPPER PCB 0242-28596 KIT, 0240-27798 KIT, EXT PUMP 0200-35002 BLADE, ROBOT, 5" 0200-36631 PLATE COVER, 8" 0200-36630 PLATE COVER, 8" LEYBOLD VAKUUM 0010-13878 HE, PCII/E, RF MATCH PVD 0100-00793 VVC 0010-16392 ECS ASSY, 300MM, DUAL ELECTRODE .IA 2 0010-20130 BLADE ASSY, 8" 4 0010-16392 ECS ASSY, 300MM, DUAL ELECTRODE .IA 00190-25970 HEATER STRAP MFG 281406054 MASS FLOW CONTROLLER 0010-27594 LOWER ARM 0240-13275 SPARES, ENDURA 0010-38027 THROTTLE VALVE 0190-36237 INJECTION VALVE 0020-09999 THROTTLE VALVE MTR ASSY 0190-24296 VMICPCI, PC BOARD 0195-03998 CHEETAH 15K.5 0020-70285 8" BLADE BUFFER 0010-09035 THROTTLE VALVE ASSY 300MM MAGNET 3320-01026 GASKET 10" 0015-00517 CLAMP VESPEL 0190-70087 MDX-L12M 0190-76008 MDX-L12M 0242-02791 KIT, CH.D WATER HOSES 0010-13080 ASSY, PRECLEAN RF TUBE 0010-03840 PRODUCER CERAMIC HEATER 0010-30838 ASSY,CERAMIC HEATER,MC,HA-12,ETERNA 0110-20063 PCB ASSY; TC GAUGE 0010-31709 HEATER ASSY,HA-12 TP SR WITH CLAMP TYPE 0010-41889 300MM CESC 5MM PUCK MONOPOLAR HEATED 0020-49785 FACEPLATE,APF,300MM PRODUCER SE 0040-48594 ESC, TESTED, 300MM DUAL HE, HDPCVD 0040-48594 ESC,TESTED,300MM DUAL HE,HDPCVD 0040-87047 SIC SHOWERHEAD ASSY (16 INCH) 0040-87219 EMAX WALL LINER(16) 0041-26723 DPS_AE ESC(PRE BAKED) 0190-08582 800W RF GENERATOR MEGASONIC 300MM 0190-10302 PRO SE KAWASAKI BLADE 0190-15027 KAWASAKI ROBOT ASSY 0190-23942 310MM CESC 5MM PUCK BIPOLAR HEATED 0190-26328 BPG(HOT ION/PIRANI)GAUGE PROCESS.
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