用 ULVAC MLX-3000N #9156853 待售的

ID#: 9156853

製造商:

ULVAC

模型:

MLX-3000N

設備詳細信息:

Sputtering system
Multi chamber type (C to C)
Substrate size, 6" combine

Cassette-chamber
Sputter chamber
Etching chamber

Vacuum pumps:
Turbo molecular pump
Dry pump

Vacuum pumps:
Cryo pump
Cryo trap
Dry pump

Sputter source: Cathode, 12"
DC Power source
Process gas: Ar.
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