用 ULVAC MLX-3000N #9156853 待售的
ID#: 9156853
Sputtering system
Multi chamber type (C to C)
Substrate size, 6" combine
Cassette-chamber
Sputter chamber
Etching chamber
Vacuum pumps:
Turbo molecular pump
Dry pump
Vacuum pumps:
Cryo pump
Cryo trap
Dry pump
Sputter source: Cathode, 12"
DC Power source
Process gas: Ar.
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製造商:
ULVAC模型:
MLX-3000N設備詳細信息:
Multi chamber type (C to C)
Substrate size, 6" combine
Cassette-chamber
Sputter chamber
Etching chamber
Vacuum pumps:
Turbo molecular pump
Dry pump
Vacuum pumps:
Cryo pump
Cryo trap
Dry pump
Sputter source: Cathode, 12"
DC Power source
Process gas: Ar.
