二手 KLA / TENCOR 6220 Surfscan #181364 待售

Non-patterned Wafer Inspection System Model No.: 519928 Compatible for 2", 3", 82mm, 4", 5", 6", 8" Thickness: SEMI standard wafer thickness Material: Any opaque, polished surface which scatters less than 5 percent of incident light Smaller sizes factory-set at time of order Defect Sensitivity: 0.09 micrometer diameter PSL sphere equivalent with greater than 80 percent capture rate Haze/Sensitivity: 0.02 ppm minimum Resolution: 0.002 ppm Repeatability: Count repeatability error less than 0.5 percent at 1 standard deviation (Mean count greater than 500, 0.364mm dia. latex spheres) Count Accuracy: Better than 99 percent (verified with VLSI Standards’ Relative Standard) Spatial Resolution: 50mm spacing, minimum Dynamic Range: 0.07 micrometer to 9,999mm in a single measurement Throughput: 100 wph (200mm) at 0.12mm Contamination: Less than 0.005 particles/cm2 greater than 0.15 mm dia. per single pass Cassette Handling: Single puck wafer handling from two cassettes (one sender/receiver, one receiver) Illumination Source: 30 mW Argon-Ion laser, 488 nm wavelength Operator Interface: Mouse and/or dedicated user keypad Physical Characteristics/Height: 168 cm (66 in.) Shipping Weight: 300 kg (670 lbs) Installation Requirements/Vacuum: 508mm (20 in.) Hg. Electrical: 200-240V, 50/60 Hz Power Requirement: 2 kVA Ducted Venting: Two 102mm (4 in.) exhaust hoses Environment: Class 10 or better 2001 vintage.