二手 RIGAKU 3640 XRF #157114 待售
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ID: 157114
晶圓大小: 6"-8"
優質的: 2003
Wafer / Disk analyzer, 6"-8"
5 Standard elements for measuring:
Ti, TiW(90/10), Au, TiW/Au (layer 1 TiW & layer 2 Au), Ti/Au(layer 1 Ti & layer 2 Au)
Each correlation parts with (3) different thickness for measurement check
Applied to semiconductor / drive IC front end process of bumping
Configuration:
Main body: Measuring stage with vacuum function by X-ray
Main column and chamber
Single chamber only
Manual wafer transfer robot unit
Display unit:
Monitor shows statistic character on monitor
Power transformer BOC EDWARDS IL70 dry pump
Chiller: Yes
Utilities:
CDA
N2
PCW
Main M/C
Holders, 6"-8"
X-Ray tube
Ti Goniometer
Scanning goniometer
Heat exchanger
High voltage transformer
Automatic voltage regulation
Manual L/UL
Control and vision system:
Control system: PC Based with RS232 port
Operation man-machine interface: Color touch panel, 18"
Data collection: yes
Facility and environment:
Operation temperature: 15-25°C
Relative humility: ≤75%
N-2 for dry pump:
Flow rate: 10 mL/min
Pressure: 0.3~0.7 MPa (3~7kg/cm-2)
Cooling water for heat exchange:
Temperature: ≤ 30 °C
Pressure: 0.2~0.4 MPa (2~4kg/cm2)
Quality: City water
Cooling water for dry pump:
Flow rate: 3.5 L/min
Temperature: ≤30°C
Pressure: 0.2~0.4 MPa (2~4kg/cm2)
Quality: City water
(2) Operation manuals
Installation instruction
System module introduction
Operation instructions
Safety instructions
(2) Repair and maintenance manuals
PM Instructions
Trouble shooting instructions
Circuit diagram
208 VAC, 60 Hz, 3 Phase, 80A
Currently warehoused
2003 vintage.
RIGAKU 3640 XRF是一種能量色散X射線熒光設備，設計用於測量土壤、礦石、零件等材料中的微量元素成分。這套X射線系統結合了3 D掃描、高速數據采集和多通道分析儀等先進技術，提供了高精度的結果。3640 XRF的核心是產生短波長X射線的X射線激發源。然後，準直器將這些X射線對準樣品材料。當X射線與材料相互作用時，它們激發材料中的電子，使它們發出熒光X射線。這些熒光X射線再由探測器收集，由多通道分析儀分析。多通道分析儀記錄樣品材料發出的X射線的強度、能量和光譜。RIGAKU 3640 XRF單元能夠近乎實時地測量材料中不同元素的組成。這使得它可用於廣泛的應用，如過程控制、質量保證和環境監測。機器還執行3D掃描,從而可以測量樣品的多個深度和位置中的微量元素。該工具還旨在提供準確的結果。它使用高分辨率多通道分析儀，即使是最低能量元素也能檢測到。此外,該資產的用戶友好軟件允許快速、輕松地導出數據以進行進一步分析。3640 XRF模型適用於研究、教育和工業環境中的多種應用。其先進的技術、準確性、可移植性和快速的安裝時間使其成為任何類型項目的理想選擇。
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