VARIAN 3180

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設備詳細信息 技術規格如晶片的大小，尺寸，加工＃等 VARIAN 3180 Sputtering system, 5" With Pre-heat Nos Chambers: 1 Preheat + 3 sputter chambers Controller Type: Fluke 1722A Software: V3.1 Electrical: 380VAC; 3 Phase Argon Control: - Baratron: MKS - Controller: MKS Controller model 250 Chambers Heater Controller: Fenwal Shutter Interlock: yes Ion Gauge Controller: Varian 880 Cryopump Type: CTI-CryoTorr-8 Cryopump Compressor: CTI 8200 water cooled Coaxial Feedthru Type: Ferrofludic Feedthru Station 1: Process: Pre-Heat Heater / RF Gen Type Single flat Station 2: Process: Al - Con Mag I Power Supply: 12kW Con Mag Shutter Feedthru Type Ferrofludic Feedthru Sput hour meter yes Station 3: Process: AlSi - Con Mag I Power Supply: 12kW Con Mag Shutter Feedthru Type Ferrofludic Feedthru Sput hour meter yes Station 4: Process: AlSi - Con Mag I Power Supply: 12kW Con Mag Shutter Feedthru Type Ferrofludic Feedthru Sput hour meter yes MISCELLANEOUS Mechanical Pump Acatel Oil 1997 vintage. 更多細節帶來更準確的推薦。 * 必填項目 必填項目