二手 EVG / EV GROUP 501 #166262 待售

DVD bonder, up to 6" Upgraded AB-1 Hole in center for DVD's (not for wafers) Specifications: Bond chamber: For max. vacuum 5 x 10 -2 mbar Pump time <3min from 1000 to 5 x 10-2 mbar Purge time <10sec from high vacuum to 1 bar Electronic rack pneumatic plug in unit, PC-interface card and slot for vacuum controller With PC software control (requires Windows® 95 or higher) Data storage on hard or floppy disk Automatic control of the contact force Automatic recording of the bond process Storage of the values as ASCII file (can be used in other Windows® applications) Personal computer included Handling tool for unloading of bond tools Software: Easy program commands for all parameters for anodic and pressure bonding. Four free programmable in- and output interfaces (24 V) for control of optional accessories (vacuum pump, automatic valves, etc.) Recipe protection via password; recipes can be read and used without knowing the password Pressure cover: For pressure bonding for 6" substrates Adjustable contact force up to 3500N (790 lbf) Resolution: 3.5 N steps For vacuum level as specified in basic unit Pressure insert: Dedicated pressure insert for 5" discs Compliant layer set Vacuum equipment: Oil-free roughing pump with a pumping capacity of 5m3/h ultimate vacuum 5,0x10E-2mbar abs Imprint tool, 5": For stamps up to Ø 125 mm Bond chuck with mechanical clamping Separation flags Nitrogen or compressed air (dried, cleaned): 6-8 bar Flow rate: 130 Liter / min (275 ft3/h) Cooling water: Pressure: 3 - 5 bar (44 - 73 psi) Flow rate: 1 - 2 Liter/min Connection diameter (outer diam.): 8mm Temperature: 18 °C Power: 120V/208V, 3 phase + ground (4 wire system), +/-5%, 50/60 Hz, direct hookup Requirements: max. oxygen content: < 4mg/kg max. chloride content: < 100mg/kg no aggressive carbon dioxide and ammonia should not be detachable use GLYCOL: 30 - 50 % pH value: 7 – 9 Missing: Dial gauge for bow pin height Lip seal Temperature measurement not working properly Currently stored in a cleanroom 1999 vintage.