二手 ASM Advance 300 VT #9206104 待售

Vertical LPCVD furnace Process: Oxide CIM Hardware configuration: Main system: Main body (Carrier stage) Utility box Handler system: Wafer handing robot Boat elevator Cassette loader Configuration: Safety specification: ASM Standard System layout type: U/Box type (I) System hand: LL N2 Load lock Heater type: Temp wire Torch heater Process gasses: Process gas 1 / N2 (30SLM) Process gas 2 / O2 (20SLM) Process gas 3 / HCL Process gas 4 / N2O Process gas 5 / H2O Gas distribution system: Basic style: Conventional gas system Tubing material: Stainless steel Tubing finish: Electro-polished Manual & air-operated valve: Nupro MFC Unit Wafer / Cassette handling: SEMI STD-Notch, 8" Cassette type: Entergris / 704-503T2 Cassette number of wafers: 25 Cassette storage: 16 Fork type / Material Fork variable pitch Boat / Pedestal: 2 Boat (150) Production wafers Boat rotation not installed System control: System controller: IBM 486 OS2 Torch controller: H2O Separate element Pre burner Signal tower colors: G / A / B General pressure display unit: Pressure PSI Cabinet exhaust display unit: H20 ASM Furnace temp controller: Host communication Host communication: User host computer User host computer I/F: SECS I / II (RS232) Information transfer protocol: GEM Equipment host I/F connection: U/BOX Top Group controller: HIA Facility electrical equipment power input (2 Lines): Voltage: 208 VAC, 3 Phase Voltage: 120 VAC, 1 Phase UPS Input / Output voltage: 120V / 100V 1997 vintage.