二手 CENTROTHERM E 240 / Euro 2000 #104065 待售
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ID: 104065
晶圓大小: 4"
優質的: 1988
Horizontal diffusion furnace, 4"
Specifications:
Wafer size: 4"
Can be converted to 6" with cantelever loading system, software adjustable
Power: 384kW
ID tubes: 155 to 160 mm
C, D, E, R stacks (16 FUR.)
Temperature range: 400°C to 1200°C
CENTROTHERM controller
Gas cabinet with MFCs, exhaust facility
Soft-landing system for loading and unloading wafer under laminar
Process configuration: (4) stacks x (4) tubes
E stack:
E1: sinter/anneal
Gases: H2 / N2
MFC capacity: 10slm N2, 2slm H2
E2: sinter/anneal
Gases: H2 / N2
MFC capacity: 10slm N2, 2slm H2
E3: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 55slm O2, 10slm H2, 500sccm N2 (source)
E4: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 10slm O2, 10slm H2, 999sccm N2 (source)
F stack:
F1: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 5slm O2, 10slm H2, 500sccm N2 (source)
F2: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 5slm O2, 10slm H2, 500sccm N2 (source)
F3: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 5slm O2, 10slm H2, 999sccm N2 (source)
F4: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 5slm O2, 10slm H2, 999sccm N2 (source)
C stack:
C1: N-type doping using POCl3
Gases: N2 / O2 / POCl3 (source N2)
MFC capacity: 10slm N2, 1000sccm O2, 999sccm N2 (source)
C2: N-type doping using POCl3
Gases: N2 / O2 / POCl3 (source N2)
MFC capacity: 10slm N2, 500sccm O2, 999sccm N2 (source)
C3: N-type doping using POCl3
Gases: N2 / O2 / POCl3 (source N2)
MFC capacity: 10slm N2, 999sccm O2, 999sccm N2 (source)
C4: Al alloy
Gases: O2 / N2
MFC capacity: 999slm N2, 5slm O2, 2slm H2, 500sccm N2 (source)
D stack:
D1: Pyro oxidation with TCA
Gases: H2 / N2 / O2 / TCA (source N2)
MFC capacity: 10slm N2, 5slm O2, 10slm H2, 999sccm N2 (source)
D2: Doping with spin-on dopant / anneal / sinter
Gases: N2 / O2
MFC capacity: 10slm N2, 999sccm O2
D3: Doping with spin-on dopant / anneal / sinter
Gases: N2 / O2
MFC capacity: 10slm N2, 1slm O2
D4: Doping with spin-on dopant / anneal / sinter
Gases: N2 / O2
MFC capacity: 10slm N2, 1000sccm O2
Old furnace:
#22: Thick Al alloy
Gases: O2 / N2
Rotameter capacity: 150CD N2, 150CD O2
#23: N-type doping using POCL3
Gases: O2 / N2 / N2(S)
Rotameter capacity: 150CD N2, 150CD O2, 150CD N2 (source)
#24: Gold drive
Gases: O2 / N2
Rotameter capacity: 150CD N2, 150CD O2
Spares inventory:
Furnace:
STC / TCU interconnecting cable
(Qty 5) THERMOWELL oil units
(Qty 2) CU406 SCPB 40 DGT display boards
(Qty 2) Magnetic coupling
EXT grade wire: OMEGA RS-20-100
Thermocouple extension wire, 250'
(Qty 67) Thermocouple connectors: Omega GMP-R/S M
(Qty 80) Thermocouple connectors: Omega GMP-R/S F
(Qty 17) Grounded mini connectors: RS M
(Qty 29) Grounded mini connectors: RS F
(Qty 3) Custom heavy gauge diffusion cartridges: AD-1419
Cartridge
2-pole gold plated contact: SW142G-10-B
2-pole gold plated contact: SW142G-10-M
Set switch gold plated contact: OSWG3-10
TOL-O-MATIC cable cylinder (Aluminum tube): CC 10 SK 70
(Qty 3) Thermocouple panel meters, 230V: Omega DP 41 - TC 230
Thermocouple and fine wire welder: TL-WELD 230VAC
(Qty 4) Reference junction thermostats, VT60: 1018
Paddle belt, 12m
MFCs:
(Qty 4) MFC: COASTAL H2: 10 SLM UFC-1100A
MFC: COASTAL O2: 500 SCCM UFC-1100A
MFC: COASTAL O2: 1 SLM UFC-1100A
(Qty 2) MFC: COASTAL O2: 5 SLM UFC-1100A
(Qty 2) MFC: COASTAL N2: 10 SLM UFC-1100N
(Qty 2) MFC: COASTAL N2: 999 SCCM UFC-1100A
MFC: COASTAL SiH4: 500 SCCM FC-260
MFC: COASTAL NH3: 3 SLM FC-260
(Qty 3) MFC: MYKROLIS O2: 500 SCCM FC-2900V
MFC: MYKROLIS O2: 1000 SCCM FC-2900V
MFC: MYKROLIS N2: 1000 SCCM FC-2900V
(Qty 2) MFC: MYKROLIS H2: 10 SLM FC-2900V
(Qty 2) Cards Lag 03: p/n 001112
Display card: p/n 001022
Card: p/n 001824
Locals:
Teflon coated wire, 2-core: 20m
(Qty 3) FESTO cylinders: p/n DGS-25-50-PPV-A
(Qty 3) FESTO cylinders: 10 bar
(Qty 15) FESTO sensors
(Qty 4) Solenoids
(Qty 6) Batteries, 3.3V
(Qty 400) Miscellaneous ICS: EEPROMS, Digital ICS, reg and microprocessor
Quartzware:
(Qty 7) Tubes, 2,150 mm (161 mm dia) TESLA: DQ4-39
(Qty 6) Tubes, 2,150 mm (155 mm dia) TESLA: DQ4-09
THERMCO tube, 1,840 mm: DQ4-15
(Qty 10) TESLA cross slotted boats: DQ4-20
THERMCO cross slotted boat: DQ4: 01
(Qty 6) Hydrox quartz balloons: DQ4-05
Thermocouple sheath, outer: DQ4-11
(Qty 2) White elephants: DQ4-17
(Qty 3) Inverted boats: 92 slots: DQ4-34B
(Qty 31) Inverted boats: 84 slots: DQ4-34A
(Qty 2) Boat holders: DQ4-18
(Qty 12) Injectors: DQ4-04
(Qty 2) Adaptors: DQ4-08
(Qty 3) Baffles: DQ4-12
(Qty 4) Paddles: DQ4-03
(Qty 3) End caps: DQ4-16
(Qty 10) Discs: DQ4-37
(Qty 3) Push rods: DQ4-09
(Qty 2) Plugs: DQ4-26
(Qty 5) Thermocouple sheaths, inner: DQ4-41
(Qty 3) Quartz ladders: DQ4-32
Thermocouple, p/n 101 4T-720-R-020
Facility requirements:
Electrical: 440VAC, 3-phase, 50/60Hz, 24kW maximum for single furnace
Cold water: 60 PSI, 15°C to 20°C
Air: 40 PSI
O2, H2, N2: 40 PSI
Exhaust
1988 vintage.
CENTROTHERM E 240/Euro 2000擴散爐以其創新的結構和多用途可靠的運行提供了最高的性能水平。這個現代的擴散爐結合了100瓦加熱元件的魯棒性和功率以及溫度傳感器的靈敏度來控制溫度。它的高級功能包括易於使用的觸控、用於讀取實時溫度值的數字顯示屏以及用於執行日常工作的用戶友好軟件,例如生成流程報告、控制多個設備和單獨配置區域。E 240/Euro 2000擴散爐采用雙壁級聯和可移動熱點,以實現最佳的傳熱和溫度穩定性。由此產生的均勻熱分布可以通過多種方式進行調整,有一系列的可變通量元素和熱區點配置。它還具有高效的溫度控制冷卻系統,先進的真空技術對環境進行終極控制,以及高質量的絕緣以最大限度地提高能效。該爐配有三相功率轉換、可調導引和集成式安全開關。具有均勻性可調、熱點可快速調節、載氣流動路徑可調等特點。CENTROTHERM E 240/Euro 2000具有可調節的動態過程窗口,可嚴格控制沈積過程。其集成的運動控制平臺和負載鎖允許用戶對多達32個程序進行編程和存儲,每個程序最多600個步驟。E 240/Euro 2000提供了一整套配件,如預處理室樣品、可編程的自動小零件進紙器、退火和翻新托盤,以及一系列定制設計的工具。這些配件使用戶能夠根據自己的具體要求對爐子系統進行充分的調整,從而使工藝室的設計和建造與預期功能完美匹配。最後,CENTROTHERM E 240/Euro 2000擴散爐的設計是為了最大限度的正常運行時間和可靠性,讓用戶對他們的爐的性能保持信心。堅固的結構和加固的包層有助於保護敏感的工作部件,低維護的結構有助於減少停機時間,從而提高生產率和盈利能力。
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