二手 CENTROTHERM E1550 HT 260-4 #9260101 待售

Horizontal furnace, 6" (4) Stacks (4) Tubes configuration: LPCVD LTO-PSG LPCVD HTO POCl3 Diffusion Wet oxidation Heating element: 100-600°C Flat length: 600 mm Diameter: 260 mm (5) Heating zones Heating element: 400°C-1050°C Flat length: 600 mm Diameter: 260 mm (5) Heating zones (2) Heating elements: 600-1300°C Flat length: 600 mm Diameter: 260 mm (5) Heating zones Furnace cooling system: Integrated gas system for DCS: HTO / TEOS process (3) Standard cooling systems: Tube closed cycle water cooling system CENTROTHERM Machine Interface (CMI) Graphical user interface (4) Furnace control systems (Field bus: CAN) (4) Temperature measurements (4) REG 97 Temperature controllers Fuzzy enhanced PID control (4) Cascade temperature controls (4) Profiling elements For (5) zone heating elements: Type R Security system CMS Independent for up to (4) tubes Automatic pressure tightness system for closed tube systems Scavenger (2) Tube closures Closed tube for soft landing system Vacuum door for soft landing system (4) Tube loading systems: For soft landing process boat Gas system cabinet GVS With main gas lines for N2, O2, H2, SiH4, SiH2Cl2, PH3, N2O Gas / Vacuum system: LPCVD: LTO-PSG Gas lines: N2, SiH4 (Rear), PH3 (10% in Ar) (Front, rear), O2 (Front, rear) without vacuum pump Gas / Vacuum system: LPCVD: HTO Gas lines: N2, SiH2Cl2 (front, rear), N2O (front, rear), without vacuum pump Gas system: POCL3 Diffusion Gas lines: N2, N2 (POCl3), O2, O2 (High) Gas system: Wet oxidation (Hydrox - ext. torch, DCE – TransLC) Gas lines: N2, O2, H2, N2O, N2 (DCE), O2 (DCE) Laminar flow system: For vertical flow Process boat lift Without storage and controlling computer, 6" Process boat storage Storage positions plus one manual loading storage, 6" Loading port Process boat transfer system Flat aligner Power supply: UPS10 No auxiliary equipment 2016 vintage.