二手 HITACHI / KOKUSAI DJ-1206VN-CX5 #9233610 待售

System, 12" Process: Zro Front body Main body Front upper Heater Power box Blower box GMP Box Source box O3 Generator Killer box N2 Purifier IGS Box Vacuum line N2 Purge box Heater exhaust Damper frame Main upper Heater upper (5) Boxes (120) Process wafers I/O Port / SMIF: FOUP Load Lock: L/L (25) Carrier slots Operation screen: Touch screen Vacuum pressure control: VAT Controller transformer: 208V, Single phase Heater transformer: 440V, 3 Phase Oxygen analyzer: NGK Module name: Process gas 1: N2 Process gas 2: He Process gas 3: Zr Process gas 4: O2 Gas distribution system: Basic style: conventional Tubing material: SUS-316L Tubing finish: VCR MFC: STEC Ozone system: MKS Manual & air-operated valve: FUJIKIN Exhaust distribution system: Air-operated valve type: VCR Connect Main valve: VAT Pump line Cassette In/Out port Cassette handling robot (16) Cassette storages Wafer transfer type: 1 + 4 Fork material: AL2O3 (5) Forks Fork variable pitch Fork wafer presence sensor Elevator handling: Boat elevator Auto shutter Boat rotation Mechanical parts Heating chamber: Heater type: RHC (5) T/C Types (5) Spike T/C Missing parts: CX5000 System controller CQ1700 Temperature controller 2006 vintage.