二手 KOKUSAI Quixace II NITRIDE #9182061 待售

Vertical LPCVD furnace, 12" Cartridge heater Heater control Over-temperature Thyristor unit for control I/O Shutter stage: AGV / PGV / OHT Stage FOUP Loader Rotation FOUP storage FOUP Opener Wafer detection Wafer transfer Variable wafer pitch converter Boat elevator Boat changer Furnace port shutter Boat rotation AWTC Port Flange-upper Flange-lower Quartz boat Quartz outer tube Quartz inner tube Quartz adiabatic plate Quartz boat fixing ring Quartz nozzle 1: D4CN55589 Quartz nozzle 2: D4KN31319#D Quartz boat fixing ring Quartz boat Quartz outer tube Quartz inner tube Quartz adiabatic plate Quartz nozzle 1: D4CN55589 Quartz nozzle 2: D4KN31319#D Quartz nozzle 3: D5CP15682 Quartz nozzle 4: D5CP15683 Quartz nozzle 5: D5CP15684 Quartz boat fixing ring SiC Boat Quartz outer tube SiC inner tube SiC adiabatic plate Quartz nozzle 1 Quartz nozzle 2 Quartz boat fixing ring Gas unit (IGS): D4VX38302 Tape heater: Gas pipe 1: D4EX19130 Gas pipe 2: D4EX19131 Diffuser: D4CX33281 Mass flow controller: FC-PA785T-BW-TC Series Filter: WGSLS Series Regulator: PGM Series Pressure gauge: ZT16-S01 Hand valve: MMGD5-11D-W Series Check valve 1: MCGP5-F1X1 Series Needle valve: MMGD5-11D-W Series Air valve: MAGD5 Series Connection & fittings: VCR / UPG / SWG MFC 1: NH3, 0.5SLM MFC 2: N2, 30SLM MFC 3: SiH2Cl2, 0.2SLM MFC 4: SiH2Cl2, 0.2SLM MFC 5: SiH2Cl2, 0.2SLM MFC 6: SiH2Cl2, 0.2SLM MFC 7: NH3, 2SLM MFC 8: NH3, 0.5SLM MFC 9: NH3, 0.3SLM MFC 10: NH3, 0.3SLM MFC 11: NH3, 0.3SLM MFC 12: NF3, 1SLM Vacuum sensor (VG11): 1000 Torr Vacuum sensor (VG12) Vacuum sensor (VG13): 2 Torr Vacuum sensor monitor Main valve: VEC-SHA8-X0327 Exhaust piping: D4CX38671 Exhaust dilution line: D4CX38671 Reactor tube press leak line: D4CX38671 Jacket heater: 150° C Exhaust pipe: 150° C Process effluent trap: MKS Baratron vacuum calibration port Inlet flange heater: ESH-12964-01 (2) Injector port heaters: ESH-12965-01 ESH-12966-01 Seal cap heater: ESH-12450-02 O2 Monitor / Detector FOUP Opener system N2 Purge system Load area MFC Loading area Furnace port Radiator Filters: Carbon / Chemical 1 filters Carbon / Chemical 2 filters Carbon / Chemical 3 filters Main operation controller: SW Rev 01.05.05 EDA Controller: SW Rev 01.00.02 DDC Temperature controller: SW Rev 06.00.00 Process module controller: SW Rev 01.05.05 Wafer handling controller: SW Rev 02.04.06 (2) FOUP I/O FOUP RFID Reader Wafer mapping sensor: F3M-S1225 FOUP Sensor: E3T-ST11 SECS/GEM Communication: SW Rev 06.01.02 Includes: Hazardous gases Manual Shut off valve Lock out / Tag out Electrical: Lock out / Tag out Robot: Lock out / Tag out.