二手 MRL MDL 1148 #9170550 待售
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ID: 9170550
Diffusion furnace
Welded frame construction with antique white painted frame and panels
Front access through swing out bi-fold doors
Element on center lines, 19"
Service access: Tilt down front instrument panels
Internal round electro polished scavenger with individual tube level exhaust
Stainless steel tube: Diameter, 3"
R Spike for temperature control
Redundant excess temperature interlock
Air to water heat exchanger
Fan cooling module on top
Auxiliary power requirements: 120 V Step-down transformer
Furnace control power back-up: UPS
(6) Leveling feet
Heating elements (Tube 2, 3 and 4):
(3) Zones element
Linear thermal flat zone, 48"
Element uniformity:
+/- 1.0°C Below 600°C across linear flat zone
+/- 0.5°C Above 600°C across linear flat zone
Insulation / Energy kits are included per tube level
Load and source end blocks
Soft tube collars
Soft heat disks
Load station:
Welded frame construction with antique white painted frame and access panels
Mirror polished finish on work surface
Pullout drawers in load station base
Horizontal laminar flow with fire retardant, Class I HEPA filters
Variable speed blowers to supply air flow to HEPA filters
Front access laminar flow pre-filters
Channels on back wall allow universal mounting of cantilevers
(6) Leveling feet
Auxiliary power requirements: 110 V Outlets
Gas Plumbing Module (GPM):
Welded frame construction with antique white painted frame and access panels
(4) Stainless steel tube level shelves
Side and front access through clear vented lexan doors
(4) Leveling feet
Gas trays are mounted vertically, facing front
Main breaker and tube breaker with lock out tag out capability located in base
Element MRL MaGnA Maximum operating temperature: 1100°C
Process tube: Quartz process tube
Carriers: Quartz
Baffles: Non-product boats on load
Source end of product wafers
Load baffles: Quartz 3 plate paddle shank
Profile TC: Type R
3-Junction
Source entry
SiC Paddle: 2" Square shank, slotted
Gas tray:
(4) AERA Analog mass flow controllers (MFCs)
Nitrogen (N2), High flow
Nitrogen (N2), Low flow for carrier gas (POCL3)
Oxygen (O2), High flow
Oxygen (O2), Low flow
N2 Loop with fixed orifice
Normally open valve is provided during power fail
Pressure switch with gauge on carrier N2 per bubbler system
Bubbler assembly for POCl3 (Tube level 2, 3 and 4):
JC SCHUMACHER ATCS-15 Source temperature controller
Gas tray to bubbler to process tube: Teflon connections / Valves
Chemical ans flask
MRL Z3 Cantilever belt drive (X 3, tube 2, 3 and 4):
Box beam backbone for overall drive support
Precision linear rail providing smooth ride
(2) Profile linear bearings
Front and rear sprocket with non-particulate ladder chain
360:1 Gear reducing DC motor: 24 V
Local and remote modes of operation:
System DDC
Cantilever control box
Power supply
Digital drive controller
With Load / Unload / Stop / Local
Remote switches
Thumb wheel speed buttons
Load and unload approach photo sensors
With pre-dwell
Post-dwell prior to door closure
Boat out complete
Backside mounting
Diagnostic LED’s within power
Interconnecting cable
(3) MRL Z2 atmospheric head assemblies (Tube 2, 3 and 4)
SAINT GOBAIN Square shank SiC paddle compatible, 2"
(2) Self aligning top and bottom head assemblies
(3) Clamping assembly to secure door assemblies
Adjustable pivot pin
Paddle containment tube with torque sensitive paddle lock
Quartz door closure
SST Scavenger closure plate
Dual quartz rods with teflon retainers housed in a SST clamping tube assembly
5 Axis of adjustment
Designed for tool less head and door removal
(3) MRL Tube level controllers (Tube 2, 3 and 4)
(15) Valves on / Off
(8) MFC's to one of 4 values
(3) Zones of heat to 1 of 8 temperature
Temperature control mode: Spike or profile
(7) Front panel outputs (Lights / Horn)
Programmable step exits from one or more of following
On time (Hours: minutes: seconds)
On (12) Programmable digital inputs
On analog input (Temperature or gas) programmed value
On leak check
On profile completed
On complete boat-in or boat-out (for auto load only)
(3) Independent temperature control loops:
Direct digital temperature control
(8) Set points per loop
Programmable alert / Alarm deviation limits
Spike control mode with programmable PID coefficients
Profile control mode
(15) Valve outputs:
Designed to drive pneumatic solenoid directly (5 watt)
24 VDC Supplied with system
(8) Analog (MFC) loops:
Designed for direct interface to standard MFC's
(4) Set points per loop
Programmable alert / Alarm deviation limits
Step redirect:
(8) Redirect destinations
Programmed based on various combinations:
Digital inputs
Temperature alarms
Gas alarms
Human machine interface
HMI Color touch screen per tube level
Spare parts included:
Fuse set
Indicator light and lens set
SCR Firing card
Temperature controller 1/32 din
(2) Dual junction spikes t/c type R
Tri junction type R profiles t/c
Load end vestibule block
Source end vestibule block
Load end soft collar
Source end soft disk
Quartz process tube
(4) Quartz boats
Quartz door closure
(2) Quartz nails
(2) Quartz nail sleeves
Quartz door seal
(2) Soft O’Rings for quartz door seal.
MRL MDL 1148是為高效、精確的材料擴散而設計的擴散爐及附件包。該爐適用於各種金屬的退火、合金化、塗層。專用封裝由一個石墨熱區系統組成,該系統的電源設計用於均勻的溫度控制和精度。爐本身尺寸為91厘米寬,55厘米深,137厘米高。它有一個直徑78厘米、深度89厘米的工作室,能夠承受重達150公斤的負荷。受控溫度範圍介於環境溫度和2000°C之間,保持高度精度和均勻性。加熱通過8個外區爐完成,每個爐都有自己獨立的垂直提升門。可獨立調節的區域溫度由400 AMP晶閘管電源供電,並通過四通道工藝控制器以數字方式對其進行設置點和校正。爐子配有雙壁玻璃纖維隔熱套件,有助於防止熱量流失,保持外部清潔。另外還有一段2米長的石墨加熱元件,配有節能的冷卻套,以確保高效運行,防止絕緣變質。包裝還包括溫度調節裝置、石墨分割塊、維護工具、線組等配件。分割塊和線組可以方便、高效和安全地將擴散爐從一個位置運輸到另一個位置,並提供防塵和防塵保護。根據需要提供其他附件,例如冷卻風扇、緊急電氣切斷、氣流安全聯鎖和緊急冷卻系統。總體而言,MDL 1148擴散爐包裝非常耐用和可靠,為材料擴散提供了一個全面但價格合理的解決方案。可靠的設計、精確的溫度控制和廣泛的配件,使其成為各種金屬退火、合金化、塗層的絕佳選擇。
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