二手 TEL / TOKYO ELECTRON Alpha 808SD #293759916 待售

Furnace, 8" Process: HTSIC WDRIV CIM: SECS Carrier and wafer transfer unit ASYST / Pb90C SMIF Layout type: U / box type LL Hand VMU-40-007 Heater Torch heater Gases: N2, O2, H2, Trans-LC Wafer Type: SEMI STD-Notch Cassette Type: Entergris / XT200-01E (25) Cassette wafers (16) Cassettes Fork type / material: 1+4 / AI208 Fork variable pitch TS4000Z System controller Pyro CTL Torch controller Signal tower colours: G/R/A Pressure display units: Pressure Mpa Cabinet exhaust display units: Kpa M121 Furnace temperature controller Does not include Quartzware Gas distribution: Conventional gas system Tubing material: Stainless steel Finish: Electro-polished FUJIKIN manual and air-operated valve MFC Power: Single phase, 120 VAC 3 Phase, 208 VAC UPS Input voltage / output voltage: 120/100 V 1995 vintage.