二手 VEECO LSA 100 #293687430 待售
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ID: 293687430
晶圓大小: 12"
優質的: 2006
System, 12"
Frontend module
Electrical rack
Cassette to cassette handling
Optical output module
ROFIN DC035 Laser
Laser type: Carbon monoxide laser, 5000 W
(2) AFFINITY Heat exchanger, 25 kW
SEMI / JEITA Wafer thickness and flatness
Wafer type: Doped, Un-doped and SOI Substrate
Linear motor drive
Hot chuck
Damper
Transformer: 100 V
(2) Transformers: 400 V
Gases: CO 6%, He 94%, N2, CO2, Xe
Linear scan with fixed laser
Air ambient
Temperature: 1150°C-1350°C
LSA Chamber (DSI) with chemical filter option
Signal light tower
Water leakage sensor with pan
Electric leakage breaker
Touch screen monitor
Flat panel display
Graphical user interface
PC Controller
EBARA 25AAF202 Cooling water circulation pump missing
Non-functional parts:
Plate window
Mount blades (Left and right)
(2) Chillers (25 kW, 50 kW)
2006 vintage.
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