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ID: 293659331
Qty / Part number / Description
(23) / 81499301 / Shaft spacers, mag wheel
(24) / 85681402 / SPUR Gears, 64 pitch,1.125" PD, modified
(3) / 81969101 / Ball bearings, 440C, mic
(3) / 2111005700 / Ball bearings
(8) / 84714901 / Feeders thru, roller bag, short shaft
(10) / 2740282200 / O-Ring's
(1) / 81557601 / PCB, assy dual drive INTFC CRD
(3) / 87678902 / Sensors, proximity, vented
(4) / 2740269800 / O-ring's
(4) / 2740272200 / O-ring's, viton
(6) / A084876703 / L-Motion slit valves, 15 mm x 540 mm
(2) / 87923402 / Kits, grid assy, centre insulator, etch
(1) / 87973201 / Insulator, bottom, grid, ceramic, spectra
(4) / 81512707 / Carrier sensor assy's
(4) / 69923108 / Sensors
(4) / 86125501 / Sensors, reflective
(2) / 85984302 / Amplifiers, area sensor, M8 connector
(1) / 80336803 / Relay, double pole, mechanical
(2) / 2740926200 / O-ring's, viton
(2) / 85120502 / Connecters, profi-bus, field wire able
(3) / 2740242500 / O-ring's, viton
(3) / 81966302 / Hub's, old ham clamped
(1) / 84030904 / Vacuum switch
(1) / 81680701 / Nipple
(1) / 81680601 / Coupler
(5) / 84669005 / Hub's, old ham
(2) / 85120501 / Connecters, profibus, field wire able
(2) / 81966303 / Hub's, old ham, clamped
(2) / 82209501 / Cap, VAC
(2) / 86569701 / MFC, Piero's
(1) / 85707101 / ASSY, IO PCB
(4) / 85144604 / Motors
(14) / 70156602 / Sensors, FU-5FZ, tough flex
(28) / 81442401 / Magnet, Rings, neodymium
(110) / 70578102 / Glass Rod's, Sensor
(3) \ 80242402 / Valves
(1) \ 83009501 / 1/2" Flex line
(2) \ 85974804 / Flow switches, 1/2"
(2) \ 85974802 / Flow switches, 1/2"
(2) \ 81680702 / Nipples
(2) / 81680802 / Couplers
(4) / 85562302 / Gate, slot valves, 32 mm x 536 mm
(1) / 85562303 / Seat, slot valve, 32 mm x 536 mm
(1) / 83671501 / Cap, VAC, 500 PF, variable
(2) / 85144606 / Motors
(1) / 86494803 / Water controller, PE II
(1) / 86586845 / CA Assy
(1) / 86922404 / Kit, desiccant, H2 generator, 165 SCCM
(1) / 85525401 / Magnetic base, carrier
(1) / 82703306 / Flow / temperature switch with valve
(9) / 2740253400 / O-Rings
(1) / 82666501 / Centring ring
(2) / 88025402 / Kit, insulator/spacer without washer
(1) / 85962902 / Flow switch
(1) / 86569703 / MFC, Piezo
(2) / 85936001 / Insulators, outer, static source
(1) / 88072501 / Cap, VAC
(1) / 87765133 / Outer cylinder
(2) / 88025401 / Kits, insulator/spacer with washer
(1) / 87765120 / Anode, EH1000, Large grooved
(3) / 85610506 / Gears, 1.125 PD, with bore welded
(4) / 2740259401 / O-Rings, viton
(1) / 82868004 / Pressure switch, 40 psi
(1) / 81557607 / PCB Assy, dual drive, INTFC Card, R2S8
(1) / 81557612 / PCB Assy, dual drive, INTFC Card FTA 3MD
(1) / 81557613 / PCB Assy, dual drive, INTFC Card FTA
(1) / 69514838 / O-Ring
(4) / 87918905 / Kit, feed thru, centre insulator grid
(3) / 87720601 / Sensors assy, proximity, carrier
(3) / 87720602 / Sensors assy, proximity, slot block
(2) / 86922402 / Kits, filter, H2 generator, 165 SCCM
(2) / 87765140 / Cathode insert assy, MHC100
(1) / 86589302 / Pressure transducer
(1) / 86589303 / Pressure transducer
(2) / 87765124 / Gas isolators
(1) / 87030701 / Converter
(1) / 80242801 / Solenoid, clipped, 3-way
(1) / 83898001 / Relay with diode
(1) / 82902101 / Micro seal for MFC
(23) / 85622101 / Tubing's
(1) / 85417602 / Ethernet control module
(1) / 85227501 / Vacuum cap, variable
(1) / 87757801 / CA Assy, I/O Suppression
(1) / A085424101 / Feed thru
(1) / 2740282201 / O-Ring, viton
(1) / 86643901 / Lubricant, material oil
(2) / 87632301 / Linkage, tensioner A drive lower
(2) / 87632401 / Linkage, tensioner B drive lower
(2) / 86227001 / Timing pulleys
(1) / 87459801 / Vacuum cap, fixed
(1) / 85980701 / Elastomer coupling
(1) / 85834601 / Coupling, EKL5, type C
(4) / 84679702 / Bearings, microcode, shielded
(2) / 85763002 / Coupler, jaw spiders
(2) / 86226901 / Timing belts
(12) / 87901301 / Silicon sleeve, idler shafts
(4) / 87790701 / Timing belts
(4) / 87802701 / Timing belts
(4) / 87775001 / Bearings, microcode
(4) / 87758401 / Bearings, with flange
(2) / 83850101 / Cap's, ceramic, modified
(2) / 86196301 / Cap's, ceramic modified
(2) / 85445101 / Belt, timings, AT5, 424T, 16 W, Poly Urethane
(2) / 85843101 / Belt, timings, AT5, 424T, 16 W, Poly Urethane
(1) / 85911001 / O-Ring
(1) / 2740996600 / O-Ring
(2) / 86001401 / O-Rings
(1) / 86617401 / Assy, hose, supply, grid drawer, implant
(4) / 85444901 / Belt, timings, AT5, 424T, 16 W, Poly Urethane
(2) / 85445001 / Belt, timings, AT5, 424T, 16 W, Poly Urethane
(2) / 87647701 / Belt, timings, AT5, 424T, 16 W, Poly Urethane
(5) / 84679801 / Bearings
(5) / 84810701 / Bearings
(12) / 2740236100 / O-Rings
(1) / 85741101 / Belt timing
(1) / 85526701 / Belt timing
(10) / 86152501 / Bearings
(1) / 86959101 / Fore line connector
(1) / 85381410 / Cable
(1) / 50109001 / Vacuum capacitor
(1) / 85321401 / Isolator, secondary
(4) / 86161503 / Heat-sinks
(1) / 87942402 / Antenna source, 2 turn etch
(2) / 87906201 / Shield, mask drawer, long top side / PALLET H
(2) / 83688202 / Rough pumps
(1) / 82422506 / Power supply, PINNACLE
(1) / 85562301 / Slot valve
(3) / 86922401 / H2 Generators
(1) / 86494802 / Power supply
(1) / A083688201 / Rough pump
(1) / A086922401 / H2 Generator
(4) / 0082422508 / Power supplies, PINNACLE III Plus
(1) / 0085562301 / Slot valves
(7) / 0083217809 / ISO160 Turbo pumps
(3) / 0087651701 / ISO200 Turbo pumps
(5) / 0086583212 / Box, I/O Assy, drives
(1) / 0086798404 / Compressor
(1) / 0082840209 / Rough pump, ADIXEN, ACP 40 LG, 22 CFM
(3) / 0086583214 / Box, I/O Assy, 4-drives, ST10
(2) / 0086560611 / I/O Assy, ATM, conveyers
(2) / 0086676201 / EBARA EV-S21A Mechnical pumps, 1800 l/min
(2) / 0083131003 / RF Generators
(2) / 0084784704 / Assy, AC/DC Powers
(1) / 0086560615 / I/O Assy, 3 Driver, dual converter
(1) / 0086583216 / Box, I/O Assy
(8) / 0086896805 / MFC, 100 SCCM
(6) / 0083550301 / Ion combi gauge without display
(21) / 0081583901 / Valves
(1) / 0082158804 / Frame, PDU, with power meter
(6) / 0083369701 / Pirani gauges
(2) / 0086896801 / MFC, 200 SCCM
(2) / 0087924402 / Brackets, support, grid frame, AL Bucket
(2) / 0086896809 / MFC,50 SCCM
(2) / 0086250003 / Pirani gauges, cold cathode
(2) / 0087928501 / Assy, PLC I/O Etch
(1) / 0082643309 / I/O INSL, Power cab with PCB
(1) / 0087818601 / PWS DC Volt / current controller keeper
(1) / 0087914401 / PWS 1500 V, DC
(2) / 0087582301 / Reactive gas controllers
(2) / 0087829801 / PWS Discharge controllers
(1) / 0086204604 / Assy, source, pre-clean, SIN Coil, VERTEX
(6) / 0085275701 / Manifold implants
(3) / 0083629802 / Cap manometers
(2) / 0086569703 / MFC, 200 SCCM
(1) / 0087373503 / Backup, disk drive
(3) / 0085144606 / Motors with CPC
(1) / 0084640302 / PWS
(7) / 0085589901 / Pump manifold, ISO160
(4) / 0082110501 / Procedures
(1) / 0085164901 / Ethernet switch, 48 ports
(3) / 0086676301 / EBARA EV-S20P Rough pump
(1) / A083217809 / ATH 500M Turbo pump, ISO160
(1) / A082608403 / ADIXEN Pump, mech, 100 CMPH, IPUP.
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