二手 AMAT / APPLIED MATERIALS Centura 5200 Phase II #9233106 待售

Metal etcher, 8" Wafer shape: SNNF Chamber type / Location: Position A: (D+) Metal DPS+ Position B: (D+) Metal DPS+ Position C: (S+) ASP With enhancements Position D: (S+) ASP With enhancements Position E: STD Cool down Position F: (OA) Orienter Electrical requirements: Line frequency: 50 Hz EMO Guard ring Smoke detector at controller Smoke detector at MF Chamber A / B metal DPS+: Metal DPS R1 chamber: Upper chamber body: Anodizing Electrostatic chuck type: Polyamide ESC Turbo pump: SEIKO SEIKI STPH 1303C Upper chamber o-ring: Viton Dome: Rough DTCU: E DTCU Endpoint type: Monochromator Bias generator: ENI OEM-12B3 Bias match: Standard Capture ring: STD Polyamide ESC Source generator: Standard, 2500 W Slit valve o-ring: Viton Gate valve: TGV VAT65 Series Process control: Manometer (0.1 mtorr, 10 torr) Chamber foreline With heating jacket Cathode assy: Single type BCL3 Gas line block: Heater with watlow He UPC: MKS 649 Wafer lift cylinder: SMC Metal ASP+ chamber options: Process kit: Chuck O-Ring: Silicon Applicator: ASP+ Smart match: Tuner 1/4 guide, 2.45 GHZ, 3 kW Wave guide: Phase MSG isolator MAGNETRON Head: MKS Process control: Manometer (10 torr, 100 torr) GDP Kit: Quartzware Slit valve o-ring: Viton Plasma tube o-ring: KALREZ Generator: AX2115 VDS Heater: VDS Gas line / Final valve heater Gas delivery options: VDS Type: Ultra clean Pallet options: Valve: FUJIKIN / VERIFLO Transducer: MILLIPORE / MKS852 Regulator: VERIFLO Filter: MILLIPORE Transducer: Display per stick MFC Type: Unit 8161 Gas panel pallet A / B: Pallet: 4/6 Gas line configuration: CL2: 200 SCCM BCL3: 100 SCCM N2: 20 SCCM CHF3: 20 SCCM O2: 500 SCCM SF6: 200 SCCM AR-S: 200 SCCM (2) Pallet corrosive gas lines (5) Pallet inert gas lines (7) Filters Gas panel pallet C / D: Pallet: 0/4 Gas line configuration: O2: 5 SLM N2-S: 1 SLM (3) Pallet inert gas lines (3) Filters Gas panel facilities: Top feed multi line drop Gas panel exhaust: Top Gas panel controller: VME I Mainframe: Facilities type: Regulated Facilities orientation: Mainframe facilities back connection Loadlock / Cassette options: Loadlock type: WBLL With autorotation Loadlock platform: UNIVERSAL Loadlock cover finish: Anti static painted Loadlock slit valve o-ring type: Viton Wafer mapping: Enhanced Integrated cassette sensor Transfer chamber options: Transfer chamber manual LID hoist Robot type: CENTURA VHP+ Robot blade: Roughened AL blade Wafer on blade detector Loadlock: Bottom vent Front panel: Anti static painted Signal light tower System monitors: Monitor type: CRT Monitor AC Rack: GFI: 30 mAMP Type: AC Gen rack, 84" Controller facility interface: Remote UPS interface Generator Rack: Cooling water: Manifold type Manifold facilities: Compression tube fittings, 3/4" Heat exchanger: H2000 DI EG Cathode H2000 DI EG Wall H2000 DI EG ASP Wall Heat exchanger interface Pump interface 1998 vintage.