二手 AMAT / APPLIED MATERIALS DPS II #9255366 待售
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ID: 9255366
晶圓大小: 12"
Poly etcher, 12"
ADVANCED ENERGY Navigator 3013 Source matcher, 3155132-004
ADVANCED ENERGY Navigator 1513 Bias matcher, 3155126-020
ADVANCED ENERGY APEX 3013 Source generator, 3156113-006
ADVANCED ENERGY APEX 1513 Bias generator, 3156110-005
ALCATEL / ADIXEN / PFEIFFER A100L Load lock pump
PC: Pentium 4
Chamber A, B and C:
ESC, 0041-26723
Ceramic lid, 0200-06404
Hub, 0200-04969
Gas nozzle, 0050-88146
Quartz single ring, 0200-04619
Insulator, Quartz, 0200-36034
Lower chamber liner, 0040-43977
Upper chamber liner, 0040-81156
Cathode liner, 0021-26273
Plasma screen, 0021-26274
Lift pin, 0200-04593
Plasma screen screw cover, 0200-00933
SLD Door, 0020-89739
TGV, 0190-29611
High voltage module, 0190-23905
Lid heater, 0090-04235
FE-ICP, 0010-37963
Source outer coil capacitor, 0630-00665
TGN Gas line, 0050-88146
Gas nozzle lower clamp, 0041-10491
Gas nozzle upper clamp, 0041-10490
PCB Water leak detector, 0190-02076
Interlock module, 0190-17964
CPCI 3U Quad serial communication, 0190-23509
CPCI48 Digital 48 I/O, 0190-07450
CPCI 32/16 Analog 32/16 I/O, 0190-22967
Dnet BUS scanner, SST CPCI, 0190-16926
SBC C400MHZ 3U 4HP 64M RAM Vx works, 0190-24007
One slot 3U Power supply, 0190-07502
Helium controller (IHC) assy, 0010-07061
Heater controller, 0190-26495
EyeD SRM, 0190-28658
EyD Fiber optic cable, 0190-19764
EPD Window point, 0200-02160
Manometer window port, 0200-39135
Chamber D:
Throttle valve, 3870-03335
SLD Door, 0040-47461
Temperature controller, 0010-19317
Interlock module axiom, 12", 0190-15733
DIP Board, 0190-07450
AIO Board, 0190-22967
D-Net scanner board, 0190-16926
SBC Board, 0190-24007
Power supply board, 0190-07502
Serial communication board, 0190-23509
Pedestal, 0010-34860
Lift pin, 0021-43884
Top cap, GDP, Axiom HT, 0200-02980
Liner, side GDP, Axiom HT, 0200-02981
Lower GDP, HT2, Axiom, 0200-02272
Insert quartz glass, 3350-00048
Single ring, 0020-47977
Gas configuration:
Chamber A:
Gas / Name / Size
Gas01 / BCL3 / 200
Gas02 / HBR / 500
Gas03 / CHF3 / 200
Gas04 / CL2 / 200
Gas05 / NF3 / 70
Gas06 / O2 / 200
Gas07 / O2_S / 20
Gas08 / SF6 / 50
Gas09 / CF4 / 300
Gas10 / N2 / 200
Gas11 / HE / 500
Gas12 / AR / 500
Chamber B:
Gas / Name / Size
Gas01 / BCL3 / 200
Gas02 / HBR / 500
Gas03 / CHF3 / 200
Gas04 / CL2 / 200
Gas05 / NF3 / 100
Gas06 / O2 / 200
Gas07 / O2_S / 20
Gas08 / SF6 / 50
Gas09 / CF4 / 300
Gas10 / N2 / 200
Gas11 / HE / 500
Gas12 / AR / 500
Chamber C:
Gas / Name / Size
Gas01 / BCL3 / 200
Gas02 / HBR / 500
Gas03 / CHF3 / 200
Gas04 / CL2 / 200
Gas05 / NF3 / 100
Gas06 / O2 / 1000
Gas07 / O2_S / 20
Gas08 / SF6 / 100
Gas09 / CF4 / 300
Gas10 / N2 / 200
Gas11 / HE / 500
Gas12 / AR / 500.
AMAT/APPLIED MATERIALS DPS II是一種先進的蝕刻/灰燼設備,其設計目的是在微電子應用中產生優異的表面效果。該系統由多室超高真空處理室、獨特的燒蝕技術、精密的傳感器封裝組成。AMAT DPS II是濕法和幹法蝕刻、灰化和沈積過程中嚴格控制的理想方法。APPLICED MATERIALS DPS II專為電介質和半導體材料的蝕刻、灰化和沈積而設計。其超高真空室能夠達到低於10-8 Torr的壓力和碳束壁襯，從而最大限度地減少排氣。先進的燒蝕技術進一步提高了設備性能，允許精確控制過程參數和可靠的過程重復性。DPS II的高級傳感器包確保了對工藝參數的精確控制。它由兩個獨立的控制器和四個溫度、壓力和射頻功率監測的高溫計組成。另外，三個熱電偶和四個數控質量流控制器確保了可重復、穩定的過程控制。此外，該機還具有邊緣機器，可提供卓越的晶圓定向檢測、精密晶圓操作和晶圓定向冷卻。獨特的AMAT/APPLIED MATERIALS DPS II傳感器包提供了多種優點，包括室溫均勻性和穩定性優越，吞吐量提高，表面質量提高。此外,先進的燒蝕技術允許精確,可重復蝕刻,灰化和沈積過程控制.此外，它的多室設計允許將多個蝕刻/灰燼工藝集成到一個工具中，從而節省時間和金錢。總體而言，AMAT DPS II是一種先進的蝕刻/灰分資產，旨在為微電子應用提供卓越的表面效果。其超高真空室，獨特的燒蝕技術，先進的傳感器包確保精確，可重復的過程控制。此外，它的多室模型設計允許將多個蝕刻/灰燼工藝集成到單個設備中，從而提高吞吐量，同時將成本降至最低。
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