二手 AMAT / APPLIED MATERIALS DPS II #9255367 待售
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ID: 9255367
晶圓大小: 12"
Poly etcher, 12"
ADVANCED ENERGY Navigator 3013 Source matcher, 3155132-004
ADVANCED ENERGY Navigator 1513 Bias matcher, 3155126-020
ADVANCED ENERGY APEX 3013 Source generator, 3156113-006
ADVANCED ENERGY APEX 1513 Bias generator, 3156110-005
ALCATEL / ADIXEN / PFEIFFER A100L Load lock pump
PC: Pentium 4
Chamber A, B and C:
ESC, 0041-26723
Ceramic lid, 0200-06404
Hub, 0200-04969
Gas nozzle, 0050-88146
Quartz single ring, 0200-04619
Insulator, Quartz, 0200-36034
Lower chamber liner, 0040-43977
Upper chamber liner, 0040-81156
Cathode liner, 0021-26273
Plasma screen, 0021-26274
Lift pin, 0200-04593
Plasma screen screw cover, 0200-00933
SLD Door, 0020-89739
TGV, 0190-29611
High voltage module, 0190-23905
Lid heater, 0090-04235
FE-ICP, 0010-37963
Source outer coil capacitor, 0630-00665
TGN Gas line, 0050-88146
Gas nozzle lower clamp, 0041-10491
Gas nozzle upper clamp, 0041-10490
PCB Water leak detector, 0190-02076
Interlock module, 0190-17964
CPCI 3U Quad serial communication, 0190-23509
CPCI48 Digital 48 I/O, 0190-07450
CPCI 32/16 Analog 32/16 I/O, 0190-22967
Dnet BUS scanner, SST CPCI, 0190-16926
SBC C400MHZ 3U 4HP 64M RAM Vx works, 0190-24007
One slot 3U Power supply, 0190-07502
Helium controller (IHC) assy, 0010-07061
Heater controller, 0190-26495
EyeD SRM, 0190-28658
EyD Fiber optic cable, 0190-19764
EPD Window point, 0200-02160
Manometer window port, 0200-39135
Chamber D:
Throttle valve, 3870-03335
SLD Door, 0040-47461
Temperature controller, 0010-19317
Interlock module axiom, 12", 0190-15733
DIP Board, 0190-07450
AIO Board, 0190-22967
D-Net scanner board, 0190-16926
SBC Board, 0190-24007
Power supply board, 0190-07502
Serial communication board, 0190-23509
Pedestal, 0010-34860
Lift pin, 0021-43884
Top cap, GDP, Axiom HT, 0200-02980
Liner, side GDP, Axiom HT, 0200-02981
Lower GDP, HT2, Axiom, 0200-02272
Insert quartz glass, 3350-00048
Single ring, 0020-47977
Gas configuration:
Chamber A:
Gas / Name / Size
Gas01 / BCL3 / 200
Gas02 / HBR / 500
Gas03 / CHF3 / 200
Gas04 / CL2 / 200
Gas05 / NF3 / 100
Gas06 / O2 / 200
Gas07 / O2S / 20
Gas08 / SF6 / 50
Gas09 / CF4 / 300
Gas10 / N2 / 500
Gas11 / HE / 500
Gas12 / AR / 500
Chamber B:
Gas / Name / Size
Gas01 / BCL3 / 200
Gas02 / HBR / 500
Gas03 / CHF3 / 200
Gas04 / CL2 / 200
Gas05 / NF3 / 100
Gas06 / O2 / 1000
Gas07 / O2_S / 20
Gas08 / SF6 / 50
Gas09 / CF4 / 300
Gas10 / N2 / 500
Gas11 / HE / 500
Gas12 / AR / 400
Chamber C:
Gas / Name / Size
Gas01 / BCL3 / 200
Gas02 / HBR / 500
Gas03 / CHF3 / 200
Gas04 / CL2 / 200
Gas05 / NF3 / 100
Gas06 / O2 / 300
Gas07 / O2_S / 20
Gas08 / SF6 / 50
Gas09 / CF4 / 300
Gas10 / N2 / 300
Gas11 / HE / 500
Gas12 / AR / 500.
AMAT/APPLIED MATERIALS DPS II是一種感應耦合等離子體（ICP）蝕刻設備。它是一種高端、大型、感應耦合蝕刻（ICE）系統，具有單容器批刻蝕刻、高工藝均勻性和高吞吐量等特點。AMAT DPS II是一個頂級的蝕刻單元，具有四個流通室，集成到機器。這些腔室設計用來蝕刻各種材料，包括有機介電和金屬薄膜，以及硬掩模、外延和晶片電阻層。該工具可以配置為在一個或多個腔室模式下蝕刻,最多同時具有四層。APPLICED MATERIALS DPS II還具有先進的過程控制技術,具有基於客戶和OEM配方的集成數據庫。這使資產能夠實現良好的蝕刻一致性、高吞吐量和明確定義的過程參數。DPS II具有廣泛的蝕刻化學，從CF4-based ‘hard mask’蝕刻和XeF2-based抗蝕刻到微波碳蝕刻。這種型號的化學性能和靈活性使用戶能夠蝕刻各種材料，從矽到GaAs等等。AMAT/APPLIED MATERIALS DPS II還具有先進的電壓源智能電源,可提供可調功率、頻率和補償功能,以實現精確、可重復的蝕刻。該設備可與各種過程模擬軟件工具集成，提供精確的蝕刻過程虛擬模型，並協助過程優化。AMAT DPS II已被證明是制造微電子和光電元件的重要工具。它的靈活性、用戶友好的界面和高級工藝能力使其成為制造用於半導體和光電應用的高性能、可靠元件所需的復雜工藝的重要組成部分。
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