二手 AMAT / APPLIED MATERIALS eMax CT+ #9408194 待售

Oxide etcher, 12" TM Module (3) PM Modules AC Rack RF Rack FI (EFEM): FI Type: 5.3 FI MF Platform type: AP SUPERMICRO GEN3 0090-06587 Server SUPERMICRO GEN3 0090-06584 Server EATON Powerware 5115 UPS, P/N: 0190-26019 MKS MACRONODE 0190-22543 FI Ethernet digital I/O Keyboard video mouse, P/N: 0190-05111 D-LINK 0190-39904 Ethernet switch hub (24-Ports) Sealevel, P/N: 0190-22545 Fast Data Gateways (FTG), P/N: 0010-25273 Fast Data Gateways (FTG), P/N: 0010-25274 Short flex controller assy, P/N: 0090-06516 Scanner board short flex controller assy: SST DNET Scanner board, P/N: 0190-34513 MEI XMP Board, P/N: 0190-24445 SBS Serial board, P/N: 0190-11817 GE SBC Board, P/N: 0090-06299 (2) TAKEX SS20-TR40 Light curtains (3) TDK TAS300 Load ports (3) OMRON V640-HAM11-V2-1 RFID YASKAWA XU-RCM6801 ATM Robot YASKAWA XU-ACP4860 Aligner, P/N: 0190-14752 YASKAWA XU-ACL4230 Track, P/N: 0190-14739 YASKAWA XU-CN1170A Robot controller, P/N: 0190-23873 YAMATAKE 0190-24680 Gas panel temperature controller Intake plenum enclosure MF Platform: NSK VHP TM Robot NSK ELA-B014CG1-04 TM Robot controller (2) Cermic dual blades: Low shoe type ALCATEL A100L Single I-pump MKS 124AA-00010BB TM Baratron gauge: 10TORR GRANVILLE-PHILLIPS 275 Mini-convectron TM vacuum gauge: 10TORR (2) GRANVILLE-PHILLIPS 275 Mini-convectron load lock vacuum gauges: 10TORR (2) PANASONIC MQDB011AAD03 Load lock indexer controllers, P/N: 0190-19214 (2) Load lock diffusers STM Diffuser (2) Load lock vent valves MKS 640 Auto Pressure Controller (APC): 10TORR VAT 0190-03234 Slit valve GME Chamber port assy Lid, P/N: 0242-23452 Modular DNET IO controller (MDI): Modular, P/N: 0190-01898 MF Interlock relay, P/N: 0190-02362 MF Interlock relay, P/N: 0190-02363 Loadlock interface, P/N: 0090-01809 Mainframe interface, P/N: 0090-01810 CDN494 IO, P/N: 0190-04745 Analog power, P/N: 0190-01971 Process chamber: A, B and C: Chamber Control Modules (CCM): TENTA 0190-02076 Water leak detector board Interlock board, P/N: 0190-07052 (2) MKS 0190-23509 Quad serial boards (2) TENTA 0190-07450 Digital I/O boards MKS 0190-22967 Analog I/O board SBS 0190-22255 IP Carrier board SST 0190-16926 Devicenet scanner board TENTA 0190-24007 SBC Board, 400 Mhz TENTA 0190-07502 Power supply board Shower head, 16" Chamber liner Cathode liner Slit liner door KOLLMORGEN MAG Driver, P/N: 0190-17272 ESC High Voltage Module (HVM), P/N: 0010-16690 NORCAL TPV200 Throttling gate valve, P/N: 0190-25400 NORCAL TPV200 Throttling gate valve, P/N: 0190-25401 Embedded endpoint, P/N: 0010-10663 Ceramic puck, P/N: 0040-63474 MKS DPC HE Controller, P/N: 0010-29436 Vacuum gauges: MKS Dual range process manometer, P/N: 1350-00201 GRANVILLE-PHILLIPS 275 Mini-convectron foreline vacuum gauge, P/N: 3310-01200 Vacuum switches: MKS 41A-21439 ATM Switch, P/N: 0190-01901 MKS 51A-21440 ATM Switch, P/N: 0190-01902 ALCATEL ATH1600M Master turbo pump ALCATEL ATH1600M Slave turbo pump ALCATEL ACT1300M Master turbo pump controller ALCATEL ACT1300M Slave turbo pump controller NORCAL 3870-01455 ISO Valve NORCAL ESVP-1503T-NWB-CR ISO Valve, P/N: 3870-03304 ADVANCED ENERGY Ovation 2760 Source RF generator, 0190-17779 DAIHEN RMN-50N1 RF Bias match box, P/N: 0190-15322 DAIHEN AMN-30H RF Source match box, P/N: 0190-15323 Gas panel for chamber A, B and C: Mass Flow Controllers (MFC): Size / Make / Model 200 SCCM / CELERITY / AASGD40W1 200 SCCM / SAM / 2480G1 100 SCCM / CELERITY / AASGD40W1 300 SCCM / BROOKS AUTOMATION / GF-125C 20 SCCM / CELERITY / AASGD40W1 20 SCCM / CELERITY / AASGD40W1 20 SCCM / CELERITY / AASGD40W1 100 SCCM / CELERITY / AASGD40W1 1000 SCCM / BROOKS AUTOMATION / GF-125C 200 SCCM / CELERITY / AASGD40W1 1000 SCCM / BROOKS AUTOMATION / GF-125C 200 SCCM / CELERITY / AASGD40W1 Mass Flow Controller (MFC) for chamber A and C: Size / Make / Model 200 SCCM / CELERITY / AASGD40W1 MKS FRCA-29015 Flow Ratio Controller (FRC): Size: 1000 SCCM Type: NEXTGEN 14-Sticks Weldment type: Single line drop Etch lean AC power rack, 12" Power: 600A Front: 0195-03727 Rear: 0195-03728 (3) ENI GHW-50 RF Bias generators P/N: 0190-15319 Frequency: 13.56 MHz (3) MKS B-5002 RF Bias generators P/N: 0190-15320 Frequency: 2 MHz Spare parts: (3) UNISEM RPT6200A Chillers (3) 13.56 Mhz RF Coaxial cables (79FT), P/N: 0620-02935 (3) 2 Mhz RF Coaxial cables (79FT), P/N: 0620-03165 CHX 485 Communication cable (3) MAG Driver contactor cables, P/N: 0150-11950 EMO Interconnect 50FT cable, P/N: 0150-02438 (3) RGJP, P/N: 0150-15149 (3) Pump umbilicals, 75FT cable, P/N: 0150-35744 (3) Chamber cooling manifolds, P/N: 0190-22819 (3) E-FIB Insert, P/N: 0190-23662 Monitor rack Gas panel SLD Bottom cover Gas panel exhaust duct FI Intake plenum Enclosure IPUP Mobile worksation (3) SUS Pads.