二手 ASYNTIS Pioneer 1 #170928 待售

Compact, manual dry etcher for silicon etching Specifications: Application range: up to 500 cells/run Etch range: over 6 μm/minute on silicon (process and material dependent) temperature less than 80° C Throughput: up to 1500 cells/hour processed in stacks of up to 500 cells and cell sizes up to 150x150 mm Process Chamber: inner dimensions 400 x 460 x 430 mm (W x D x H) volume approx. 80 litres vacuum outlet with solenoid valve DN 63 ISO-K additional flanges for venting and pressure gauge manual drawer door with viewing window chamber leak rate < 5 Pa l/sec Radical Generator: water cooled microwave radical generator max. power consumption 1200 Watts max. microwave power 850 Watts frequency 2,45 GHz air cooled magnetron Gas Supply: (2) gas channels with solenoid valves and MFCs stainless steel piping with 6 mm Swagelok fittings System Controller: PLC controller and LCD display multiple process programs manual and automatic operation online viewing of process parameters status and error messages Vacuum Measurement: capacitive vacuum gauge, gas type independent measuring range 1 - 1000 P Electrical Connections: 3 phases, 230/400 VAC, 50/60 Hz, 16 A Process Gas Supply: 6 mm Swagelok, stainless steel, input pressure 2 bar Compressed Air: 6 mm Swagelok, stainless steel, input pressure 4-6 bar Nitrogen Purge: 12 mm Swagelok, input pressure 2 bar Cooling Water: 1⁄4 “ fitting brass, flow rate 1 – 1,5 l/min temperature 26 °C ± 4 °C pressure 0,5 – 1 bar Additional options available Currently de-installed 2003 vintage.