二手 GASONICS / NOVELLUS L 3510 #9411534 待售
網址複製成功！
單擊可縮放
ID: 9411534
優質的: 2000
Asher
Photoresist strip
Substrate size: 3"-8"
Footprint: 30"
Main frame:
Aluminum chamber
Quartz chamber
Wafer cooling station with PCW
Platen and lamp heating (Flexibility)
Reliable endpoint detection
Z-Bot station (Robot)
Load cassettes elevator
DC Power supply: -5, +5, -12, +12 VDC
(2) DC Power supplies: +5, -15, +15, +24 VDC
I/O Board
Distribution board
Display board
Graphics control board
Hard Disk Drive (HDD)
Floppy Disk Drive (FDD), 3.5"
Microwave generator: 2.45 GHz, 1250 W
Interlock wafer transport
Microwave power supply
Gas flow controller
Visual alarm indicator lamp
Quartz gas distribution shower heads
Radiant heating plate
UV Lamp
End point detection
Plasma system controller
Tolerance limit alarm (pressure, flow, lamps)
Gas handling module and control features
(3) Gas lines with purge:
O2 MFC
(2) N2 MFC
Stainless steel valves gas line
Solenoid control: 24 VDC
Soft pump to limit chamber turbulence
AC Power box
Circuit breaker: 30 Amp
Remote option connector
EMO Control to master system
Circuit breaker
Magnetron
Schematic display driver
Process kits
Panel included
Manuals included
Power supply: 200-240 VAC, 50/60 Hz, Single phase, 30 A
2000 vintage.
GASONICS/NOVELLUS L 3510是一款最先進的蝕刻/asher設備,旨在提供生產環境中最大的吞吐量和全過程控制。該系統是一個自我集成的平臺，以高端激光控制和軟件解決方案為特色，根據具體需要識別、測量和修改蝕刻和灰化參數。GASONICS L 3510 Etcher/Asher的創新特性和性能無與倫比。激光技術可確保制造最復雜的設備的最大精度和精確度。再者，該單元兼容各種基材和各種技術，從薄膜配方和先進的介電層到藍寶石、氧化矽等光學材料的蝕刻和灰化。NOVELLUS L 3510建在堅固、工業級的平臺上，適合苛刻的生產周期。它寬大的15英寸甲板允許快速斷開連接和模塊化附加組件,因此機器可以快速發展以適應不斷變化的生產要求。該工具還配備了單片線性諧振執行器，可最大限度地減少在大批量基板上的漂移，確保均勻分布結果並保持一致的蝕刻參數。資產的軟件平臺本身旨在使蝕刻的各個方面變得更加容易。用戶界面允許對整個過程進行全面控制，包括激光的逐步響應和多個諧振器的同時控制。此外,該軟件還允許進行個性化的流程監控、配置控制和外部反饋,以便快速、精確地進行流程調整。總體而言,L 3510 Etcher/Asher是一款一流的機型,可在廣泛的生產過程中確保可靠、可重復的結果。高精度激光控制、集成硬件平臺、綜合軟件套件確保了對苛刻蝕刻和灰化操作的最大精度和控制。
還沒有評論