二手 HITACHI M 712XT #293750872 待售
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ID: 293750872
優質的: 2006
Etcher
EPD detectors with OES and EPD computer systems
SHIMADZU Turbos
EDWARDS IQDP and PUP Dry pump
Dual zone temperature ESC
HITACHI Robots
(4) Floor chillers
(3) Load ports
(2) Etch process chambers
Chamber 1: (8) Stick gas panels
Chamber 2: (10) Sticks gas panels
Dual wafer substations on transfer module
Process kit included
2006 vintage.
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