二手 LAM RESEARCH 2300 Exelan #9054659 待售
網址複製成功！
單擊可縮放
ID: 9054659
晶圓大小: 8"
優質的: 2004
Oxide etcher, 8"
Cass nest plastic, 8"
Wafer shape: SNNF (Semi notch no flat)
(4) Process chambers:
Position 1: 2300 Exelan
Position 2: 2300 Exelan
Position 3: 2300 Exelan
Position 4: 2300 Exelan
Front end load port cassette:
(3) Open cassettes
Backing pumps for TM iPX
User interface option: Side & front monitor UI
Earth leakage breaker ELB
Signal tower
SECS/ GEM
Platform type: Version 2
2300 Exelan options:
Chamber type 2300 Exelan CFE
Upper electrode heated
ESC Cooling dual zone
1600 L/S EDWARDS Turbo pump, 8"
Endpoint detection optical emission spectroscopy
Chamber isolation valve rocker gate valve
2300 Gas box:
Gas system type: Enhanced gas box II
Std stacking kits: 4 PM Stacking kit
Gas line 12 gas configuration
Gas box inlet option: Regulated inlet gas panel
Gas filters: Standard filter
Gas box configuration:
PM1 MFC Type: Unit 1661 metal, digital
Line 1 Ar 1000 sccm
Line 2 O2 50 sccm
Line 3 N2 200 sccm
Line 4 O2 2000 sccm
Line 5 CHF3 100 sccm
Line 6 C4F8 20 sccm
Line 7 CH2F2 50 sccm
Line 8 C4F8 50 sccm
Line 9 CF4 100 sccm
Line 10 NSR70%He/30%O2100 sccm
Line 11 C4F6 20 sccm
Line 12 NSR Xe 300 sccm
Line 13 HeO2 20 sccm (Tuning gas)
PM2 MFC Type: Unit 1661 metal, digital
Line 1 Ar 1000 sccm
Line 2 O2 50 sccm
Line 3 N2 200 sccm
Line 4 O2 2000 sccm
Line 5 CHF3 100 sccm
Line 6 C4F8 20 sccm
Line 7 CH2F2 50 sccm
Line 8 C4F8 50 sccm
Line 9 CF4 100 sccm
Line 10 Line 10 NSR70%He/30%O2100 sccm NSR70%He/30%O2100 sccm
Line 11 C4F6 20 sccm
Line 12 NSR Xe 300 sccm
Line 13 HeO2 20 sccm (Tuning gas)
PM3 MFC Type: Unit 1661 metal, digital
Line 1 Ar 1000 sccm
Line 2 O2 50 sccm
Line 3 N2 200 sccm
Line 4 O2 2000 sccm
Line 5 CHF3 100 sccm
Line 6 C4F8 20 sccm
Line 7 CH2F2 50 sccm
Line 8 C4F8 50 sccm
Line 9 CF4 100 sccm
Line 10 NSR70%He/30%O2100 sccm
Line 11 C4F6 20 sccm
Line 12 NSR Xe 300 sccm
Line 13 HeO2 20 sccm (Tuning gas)
PM4 MFC Type: Unit 1661 metal, digital
Line 1 Ar 1000 sccm
Line 2 O2 50 sccm
Line 3 N2 200 sccm
Line 4 O2 2000 sccm
Line 5 CHF3 100 sccm
Line 6 C4F8 20 sccm
Line 7 CH2F2 50 sccm
Line 8 C4F8 50 sccm
Line 9 CF4 100 sccm
Line 10 NSR70%He/30%O2100 sccm
Line 11 C4F6 20 sccm
Line 12 NSR Xe 300 sccm
Line 13 HeO2 20 sccm (Tuning gas)
2300 Peripherals:
DFC Backing pumps cust supply
DFC TCU Config LAM supply: (4) 4080 Plus
Gas scrubber: EBARA GTE-3-0WVT
Power distribution module: RPDB
Dry pumps:
TM EDWARDS iPX 100A
PM1 EBARA AA100W
PM2 EBARA AA100W
PM3 EBARA AA100W
PM4 EBARA AA100W
No SMIF interface
2004 vintage.
LAM RESEARCH 2300 Exelan是一款高級蝕刻器/asher設備,專為滿足各種高級工藝要求而設計。它是一個多工具平臺,模塊化且可擴展,以滿足各種流程應用程序的需求。Exelan提供了多種可配置的參數和選項,可在很小的空間內提供卓越的性能。該系統配備了先進的磁控管源、包含實時反饋機的集成支持單元、先進的晶圓跟蹤傳輸能力等先進技術。集成的先進磁控管源具有廣泛的功率水平、頻率和氣體,為所有應用提供了卓越的精度和可重復性。Exelan的配置靈活性允許客戶選擇自己的定制級別,以最好地滿足他們的特定要求。隨附的實時反饋工具提供閉環控制,使精確度精確的配方能夠輕松修改並應用於整個工具。2300 Exelan擁有先進的晶圓跟蹤和傳輸功能,將精確對準、定位和位移傳感器與先進的軟件算法相結合,以實現無與倫比的過程控制和生產率。這一廣泛的組件,加上集成的硬件、軟件和通信功能,構成了一個強大可靠的高級、完全可用於生產的蝕刻平臺的基礎。Exelan還可以通過標準以太網連接提供遠程支持,用於監視、診斷和升級。此資產使客戶能夠靈活地自定義其軟件環境以滿足自己的特定要求。LAM RESEARCH 2300 Exelan提供了一個高級、功能齊全的平臺和靈活性,可滿足各種應用需求。它的模塊化設計允許可擴展性和可配置性,而其專有的控制模型則允許精確和可重復的過程。此用戶友好平臺可輕松升級以滿足未來需求,並集成到現有生產線中。憑借其先進的磁控管源、集成的支持設備以及晶圓跟蹤和傳輸能力，Exelan是任何工藝要求的理想選擇。
還沒有評論