二手 LAM RESEARCH 2300e4 Exelan Flex DX #293601041 待售

Dielectric etcher, 12" Seismic bracket TM Weight dist plate TM (3) Seismic brackets PM (3) 2300 Flex DX 2300e4 Platform 2300 Process module 2300 Flex D Series option (3) 4XX Series ESCs (3) PM Facilities: Dual with temp monitor (3) Flow meters: 10 GPM (3) eDGF+ Gas feeds Dual zone ESC Cooling flex D Series Heated foreline manometer Top Pl Chamber manometer Baffle Lower isolation valve: Viton Chemraz vacuum valve Interconnect hardware: Pump to TCU 100ft TCU to PM 100ft (3) Interconnect hardware: Pump to PM 100ft EMO Cables: (3) TCU to RPDB 50 ft (3) Pump to RPDB 50 ft 2300 Flex D Series quick clean kit 2300 Gas box 2300 Flex D Series Jetstream (3) Jetstream gas lines (6) Heated gas lines (51) HORIBA D519 (17) SST Facility interface boxes (17) SST Facility interface boxes UI Display with disp trans (16) UI Display with disp trans 2300 Platform (E) (3) Hermos carrier ID Additional load port (3) Corrosion resistant LPM WIDS Btm read RGV / OHT PIO Sensor Conditioning station (7 Wafer) AUX Buffer: 25 Slot Vespel wafer finger EDWARDS iXL Vespel single sense Advanced aligner User Interface: Side and front monitor System UPS circuitry Internal UPS bypass with UPS Earth leakage breaker Cable: TM-Subpanel, 100 ft Signal light tower, R-G-A Slim line Light curtain Input buffer corr res without Exh Flow monitoring System calibration and alignment Service step for PM Ionizer kit ATM Duct interface Robot CDM Light tower buzzer Metric to inch conv fittings APCS SVID and facility interface board VTM Breakout board / cover 2nd TM Pump standard with EQ 2300 Peripheral (3) Non-qual 2-Channel TCU Gateway communication 2300 Ship ahead Standard ship ahead item 2300 Additional enhancement Standard process quality Standard training Wafer flow tuning APC Recipe tuning host 2nd HSMS NSR 8423, Hardware firewall EDA2 NSRL 1000 Generator: 60 MHz 2017 vintage.