二手 LAM RESEARCH 4520i #9196534 待售

Etcher, 6" Verity enhanced endpoint detection LAM RF Generator rack: ISO AE RFG 1250 RF generator Chamber process kit parts: Attachment ring Upper and lower baffles Electrode clamp ring Filler ring lower clamp Focus ring edge lower Bottom wafer clamp Single wafer Flat notch orientation Integrated isotropic-anisotropic etching Wafer temperature control:  Reduced loading effects Variable gap spacing: Wide process flexibility Parallel plate reactor: Proven etch technology Inductive RF auto tuning: Fast accurate RF tuning for precise control Thermal oxide etch rate: ≥ 4500 A/min BPSG Etch rate: >7500 A/min TEOS Etch rate: >5000 A/min Uniformity: +/- 10% 3 Selectivity BPSG/TEOS to poly: >15:1 Particles: 0.3μm size Does not include dry pumps or chiller 2004 vintage.