二手 LAM RESEARCH Alliance 6.0 TCP 9400 PTX #9024652 待售
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ID: 9024652
Dry etcher, 8"
CASS NEST PLASTIC 8"
Wafer Shape SNNF (Semi Notch No Flat)
SMIF Interface NO
System Information:
Platform type ALLIANCE 6.0
Process chamber qty 3
Software version A2.2-018
SECS/ GEM yes
Chamber Location / Type / Current process:
Position 1 (PM1) TCP9400PTX / Poly etch
Position 2 (PM2) TCP9400PTX / Poly etch
Position 3 (PM3) TCP9400PTX / Poly etch
Position 4 (PM4) none
Etch Chamber:
Chamber type TCP9400PTX
Turbo pump EDWARDS STP-A1303CV80
Turbo N2 fixed or MFC Type Fixed
Helium UPC UPC-8130
Endpoint detector none
Pendulum valve model VAT 65046-PH52-ADE
Chamber Manometer MKS E29B-23813
Turbo Manometer MKS 625A-14375
Foreline Manometer MKS 625A-14059
Helium Manometer yes
Top RF generator model AE / 3155059-026
Bottom RF generator model AE / 3155059-028 (RFG1250 HALO)
TCP Match yes
Bias Match yes
TOP RF Sense Box yes
Bias RF Sense Box yes
Auto Tune Board yes
DIP Board yes
VCI Connected No
Gas configuration and setup:
Chamber volume used for gas cal 36200 ml
Gas Box:
type Extended capability gas box – Phase II
gas box qty 3 (stacking)
manual valve yes on each line
pressure gauge yes on each line
regulator yes on each line
filter yes on final line
Gas Panel Pallet:
gas line qty with N2 purge line 8
gas line qty without N2 purge line 0
MFC type UFC-1661 / UFC-1660 / UFC-8160
Gas line (gas name, MFC size)
PM1
line 1 O2 100 / UFC-1660
line 2 NF3 100 / UFC-1661
line 3 He 200 / UFC-1660
line 4 CF4 200 / UFC-1660
line 5 SO2 100 / UFC-1660
line 6 SF6 200 / UFC-1660
line 7 Ar 200 / UFC-1660
line 8 none
PM2
line 1 O2 100 / UFC-1660
line 2 NF3 100 / UFC-1661
line 3 He 200 / UFC-1660
line 4 CF4 200 / UFC-1660
line 5 SO2 100 / UFC-1660
line 6 SF6 200 / UFC-1660
line 7 Ar 200 / UFC-1660
line 8 none
PM3
line 1 O2 100 / UFC-1661
line 2 NF3 100 / UFC-1661
line 3 He 200 / UFC-1661
line 4 CF4 200 / UFC-1660
line 5 SO2 100 / UFC-1660
line 6 SF6 200 / UFC-1660
line 7 Ar 200 / UFC-1660
line 8 none
Mainframe:
Loadlock Dual VCE Loader / Manual Door open
Robot type BROOKS MagnaTrain 7 (with Dual aluminum blade)
EMO button front, side
Signal tower (front) green, yellow, red
Remotes:
RPM
Qty 1
EMO button yes
Line frequency and voltage 208VAC 3ph
Remote UPS interface yes (105V 1ph)
UPS yes
System monitor display 1 (front)
Heat Exchanger Type:
For Cathode NOAH PRECISION, LLC / Model 3300 (-20 ~ +90degC)
qty 3
Pumps Type:
Transfer Module EBARA A70W (not included in scope, needed to confirm)
PM1 EBARA A30W (not included in scope, needed to confirm)
PM2 EBARA A30W (not included in scope, needed to confirm)
PM3 EBARA A30W (not included in scope, needed to confirm)
Gas Scrubber:
qty 1
Type EBARA GTE-3-0WVT (not included in scope, needed to confirm)
1998 vintage.
LAM RESEARCH Alliance 6.0 TCP 9400 PTX是一款功能強大的蝕刻器/asher,旨在滿足最苛刻的工業加工要求。PTX采用先進技術,旨在提供卓越的性能和效率。該設備具有一系列功能，能夠實現經濟高效的生產。它由一個工藝室、一個氣源、一個熱源、一個氣箱、一個工藝定序器、一個基板尺寸檢測器、一個直流偏置電源和一個射頻電源組成。這種組分組合提供了高效、高效的各向異性蝕刻和灰化系統。該工藝室設計具有統一、可重復的加工質量特點。射頻電源可提供精確和受控的電源,用於精確蝕刻和灰化。溫度和氣體控制單元確保過程化學的各個方面都得到準確的監測和控制，以確保可重復的過程結果。氣源設計用於廣泛的能力，包括輸送Cl2、SF6、O2和Ar等各種工藝氣體。熱源集成到機器中，為可重復的各向異性蝕刻和灰化過程提供了經濟高效的解決方案。一個綜合氣體箱控制精密蝕刻和灰化過程氣體的混合。流程定序器提供流程控制,使工具能夠自動調整以適應各種流程條件。基板尺寸檢測能力保證了蝕刻和灰化過程的準確性和可重復性。直流偏置電源可提高基於基材材料和工藝條件的蝕刻和灰化速率。總體而言,LAM RESEARCH Alliance 6.0 TCP 9400 PTX是一款功能強大且可靠的蝕刻器/灰化器,旨在滿足工業加工設施的需求。它具有先進的設計和先進的技術,以確保可重復的結果和卓越的性能。
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