二手 LAM RESEARCH Alliance 9100 PTX #293666065 待售

Oxide etcher, 8" Non-functional Robot: MAG 7 (Dual end effector) (2) Chambers Wafer type: Notch, 26 slots EMO Guard ring SECS/GEM Interface TCP9100 Process module Pendulum throttle valve VAT 65 Gate valve 65046-PH52-ADE1 VAT Step motor 650PM-36PM-1004 VAT Adaptive pressure controller Gas panel exhaust flange Gas Pallet Chamber 1 and 2: Ar (500 sccm, Analog) FC-780C O2 (2000 sccm, Analog) FC-780C C4F8 (50s ccm, Analog) FC-780C CHF3 (100 sccm, Analog) FC-780C C5F8 (50 sccm, Analog) FC-780C CH2F2 (100 sccm, Analog) FC-780C O2 (30 sccm, Analog) FC-780C CO (200 sccm, Analog) FC-780C Power supply: 208 VAC, 60 Hz 2000 vintage.