二手 LAM RESEARCH Alliance A4 9600 #9204633 待售

Etcher (4) Chambers Alliance (A4) mainframe (4) 9600 SE Process modules (Used for metal etch process) VCE Robotic arm extend drives Auto door option Bellows style cassette / Platforms Wafer aligner LL Slide sensor Pre-post alignment Magnatran 7 robot PM1 Configuration: Alliance 9600 SE: Generator (X2): AE-RFG 1250 Turbo pump: SEIKO SEIKI STP1303C Electrostatic chuck included Upgraded VAT 65 pendelum throttle valve NOAH 3500 POU Chiller for ESC temperature control Endpoint detector With chan A-703 nm chan B 440 nm Gases panel configuration: Unit 1661 model MFC's (X6) MFC1 SF6 200 sccm MFC2 O2-Hi 50 sccm MFC3 Ar 300 sccm MFC4 O2-Lo 10 sccm MFC5 NF3 100 sccm MFC6 N2 100 sccm (Spare) PM2 Configuration: Alliance 9600 SE: Generator (X2): AE-RFG 1250 Turbo pump: SEIKO SEIKI STP1303C Electrostatic chuck included Upgraded VAT 65 pendelum throttle valve NOAH 3500 POU chiller for ESC temperature control Endpoint detector With chan A-703 nm, chan B 440 nm Endpoint monochonometer Gases panel configuration: Unit 1661 model MFC's (X6) MFC1 SF6 200 sccm MFC2 O2-Hi 50 sccm MFC3 Ar 300 sccm MFC4 O2-Lo 10 sccm MFCS NF3 100 sccm MFC6 N2 100 sccm (Spare) PM3 Configuration: Alliance 9600 SE: Generator (X2): AE-RFG 1250 Turbo pump: SEIKO SEIKI STP1303C Electrostatic chuck included Upgraded VAT 65 pendelum throttle valve NOAH 3500 POU Chiller for ESC temperature control Endpoint detector With chan A-703 nm, chan B 440 nm Endpoint monochonometer Gases panel configuration: Unit 1661 model MFC's (X6) MFC1 SF6 200 sccm MFC2 O2-Hi 50 sccm MFC3 Ar 300 sccm MFC4 O2-Lo 10 sccm MFC5 NF3 100 sccm MFC6 N2 100 sccm (Spare) PM4 Configuration: Alliance 9600 SE: Generator (X2): AE-RFG 1250 Turbo pump: SEIKO SEIKI STP 1303C Electrostatic chuck included Upgraded VAT 65 pendelum throttle valve NOAH 3500 POU Chiller for ESC temperance control Endpoint detector With chan A-703 nm chan B 440 nm Endpoint monochonometer Gases panel configuration: Unit 1661 model MFC's (X6) MFC1 SF6 200 sccm MFC2 O2-Hi 50 sccm MFC3 Ar 300 sccm MFC4 O2-Lo 10 sccm MFCS NF3 100 sccm MFC6 N2 100 sccm (Spare) System peripherals and ancillary components: Remote AC box (RPM) Gas boxes per chamber ((4) Stackable) (4) NOAH POU Chiller model 3500 Cathode cooling and temperature control Includes: 3500 Controller or equivalent Auxiliary rack for controllers.