二手 LAM RESEARCH Alliance A6 9400 DFM-P #9133861 待售
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ID: 9133861
晶圓大小: 6"-8"
優質的: 2000
System, 6"-8"
(2) Blade BROOKS Mag 7 robots
(3) Monitors
Load lock:
Load lock type: Auto door
VCE Elevator: Bellows
Mapping sensor
Cassette type: (25) Slot cassettes
VCE Gate valve
VCE Vacuum isolation valves
TM Vacuum isolation valves
TM Pneumatic valves
TM LID Information:
Pneumatic cylinder lift
Up / Down / Actuate switch
Transport system control
Transport VME:
MVME 147-011, VME335, DIOXVME-240
Multiplexer PCB
Light tower PCB
Chamber information:
Position 1:
Chamber type: No
Position 2:
Chamber type: 9400 DFM-P Poly etch chamber
Chamber process: Poly
Turbo pump with controller: ALCATEL ATH 1600M
VAT Gate valve: VAT65 Pendulum valve
RF Generator bias: ADVANCED ENERGY RFG1250HALO 13.56 MHz
RF Generator TCP: ADVANCED ENERGY RFDS 13.56 MHz
Position 3:
Chamber type: 9400 DFM-P Poly etch chamber
Chamber process: Poly
Turbo pump with controller: ALCATEL ATH 1600M
VAT Gate valve: VAT65 Pendulum valve
RF Generator bias: ADVANCED ENERGY RFG1250HALO 13.56 MHz
RF Generator TCP: ADVANCED ENERGY RFDS 13.56 MHz
Gas box information
PM1 Gas box
PM2 Gas box
MFC Channel gas MFC type
MFC Size
(SCCM)
AC 01 – CHA C4F8 FC-D980CU 50
AC 02 – CHA O2 FC-D780CU 100
AC 03 – CHA CHF3 FC-D780CU 50
AC 04 – CHA CF4 FC-D780CU 200
AC 05 – CHA O2(30%) HE FC-D780CU 100
AC 06 – CHA C4F6 FC-D780CU 50
AC 07 – CHA CH2F2 FC-D780CU 100
AC 08 – CHA CF4 FC-D780CU 1000
AC 09 – CHA H2 FC-D780CU 1500
AC 10 – CHA AR FC-D780CU 1000
AC 11 – CHA N2 FC-D780CU 1000
AC 12 – CHA O2 FC-D780CU 3000
PM3 Gas box
MFC Channel gas MFC type
MFC Size
(SCCM)
AC 01 – CHA C4F8 FC-D780CU 50
AC 02 – CHA O2 FC-D780CU 100
AC 03 – CHA CHF3 FC-D780CU 50
AC 04 – CHA CF4 FC-D980CU 200
AC 05 – CHA O2(30%) HE FC-D780CU 100
AC 06 – CHA C4F6 FC-D780CU 50
AC 07 – CHA CH2F2 FC-D780CU 100
AC 08 – CHA CF4 FC-D780CU 1000
AC 09 – CHA H2 FC-D780CU 1500
AC 10 – CHA AR FC-D780CU 1000
AC 11 – CHA N2 FC-D780CU 1000
AC 12 – CHA O2 FC-D780CU 3000
Wafer present sensors (WPS)
TM & VCE Pump option: Single pump type
Fab clean room configuration: Bulkhead configuration
RPM: 685-495112-100
2000 vintage.
LAM RESEARCH Alliance A6 9400 DFM-P是一種可以完成各種應用的蝕刻工藝的後蝕刻等離子體灰燼。對於範圍廣泛的半導體制造商來說,asher是一個可靠的高性能選項,它具有一套高級功能。A6 9400有兩個獨立的高頻射頻源，實現了快速、高質量的蝕刻。它具有可移動的自動化軌道,具有多種負載/卸載選項,可通過多種基板尺寸和蝕刻要求實現高效吞吐量。腔室壓力是可調的，因此壓力範圍可以根據特定材料蝕刻要求精確定制。此外，Asher具有低壓射頻預清潔階段，允許減少後蝕刻中的顆粒汙染。A6 9400還具有低溫背側冷卻劑，保證了均勻的蝕刻和更快的加工時間。A6 9400 DFM-P構建在LAM成熟可靠的CXT平臺上,確保了高級功能和高性能。該設備可以處理多種基材尺寸，能夠在大面積上批量均勻，均勻性優越。它配備了直觀的軟件和硬件控制功能，包括全自動腔室操作、改進的診斷能力以及安全保護。此外,增強的粒子交互功能允許更好的控制和更長的運行時間,從而提高了流程和生產率。除了先進的功能外，A6 9400 DFM-P設計方便維護和設置。其內部部件可通過內置的服務門輕松進入，從而方便快捷地進入氣管線、閥門和安全聯鎖裝置。該系統還配備了可拆卸的門蓋，用於快速安裝和清潔，方便地訪問裝載機組件。該單元包括一個標準配方表，允許對所有蝕刻參數和配方進行「腳本」，從而提高了可重復性。A6 9400還提供可選的氧氣傳感器,可確保準確和可重復的過程控制。總體而言，Alliance A6 9400 DFM-P是一款功能強大、可靠、高效的蝕刻後等離子體灰燼。該機器提供了改進吞吐量、粒子控制和精密蝕刻的高級功能,可用於各種應用。憑借其直觀的控制、出色的工藝重復性和易於維護，asher是任何半導體生產線的理想工具。
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