二手 LAM RESEARCH Autoetch 490 #293697198 待售
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ID: 293697198
Plasma etcher, 6"
Type: Single-wafer processing
Configurable for 3"-6"
TFT Monitors upgraded
Wafer detection
Fully automated microprocessor control
Cassette-to-cassette wafer processing
Vacuum load locked
Programmable variable electrode spacing
Endpoint detection
Stand-alone or bulk-head mount
ENI RF Generator
No chiller
No pump.
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